Xanadu and Mitsubishi Chemical have agreed to collaborate on quantum algorithms aimed at improving the simulation of quantum processes in extreme ultraviolet (EUV) lithography for semiconductor fabrication.
The partnership intends to accelerate the development of advanced semiconductor chips by leveraging quantum computing to model processes that prove challenging for classical computers. EUV lithography facilitates the miniaturisation of integrated circuits, enabling progress in electronics, computing, and artificial intelligence.
Simulation challenges
As microchips become smaller, the quantum effects that influence their fabrication become increasingly complex. Quantum phenomena such as Auger decay, which involves intricate electron interactions, grow in significance at reduced scales, making it challenging for traditional computers to provide accurate simulations essential for photoresist material design.
Quantum computing offers potential advantages, as its architecture is designed to directly simulate atomic and subatomic interactions. This could lead to more effective EUV modelling and the discovery of materials suitable for future chip generations.
Division of expertise
Within this collaboration, Mitsubishi Chemical’s Materials Design Laboratory will provide insights into the molecular makeup of photoresist materials used in EUV processes. Their responsibilities include analysing and quantifying essential physical processes such as EUV absorption, Auger decay, and secondary electron effects, which contribute to the behaviour and performance of photoresists under EUV exposure.
Xanadu’s Quantum Algorithms team will contribute its experience in designing quantum-based simulations for modelling light-matter interactions and secondary electron effects. These simulations are aimed at providing a more thorough understanding of the processes that occur during EUV lithography.
“Continued progress in chip miniaturization hinges on breakthroughs in EUV lithography and the design of superior photoresist materials. Precisely modeling how these materials interact with EUV light remains a formidable challenge. Using quantum computers to simulate these interactions represents an exciting frontier in tackling this problem, offering a path to uncover material properties for future semiconductor generations.” said Torin Stetina, Senior Quantum Scientist at Xanadu.
Government support
The significance of the partnership extends to the broader landscape of quantum research and international collaboration. Recognition came from the Canadian government, through the Embassy of Canada to Japan.
“Canada is recognized as a global leader in quantum science and technology, as the result of decades of strategic investment and innovation. In this context, Global Affairs Canada’s Trade Commissioner Service (TCS) in Tokyo is pleased to see the partnership between Xanadu and Mitsubishi Chemical come to fruition.” said Mr. Louis-Pierre Émond, Minister (Commercial), Embassy of Canada to Japan.
Potential impact
The project aims to establish one of the first concrete applications for quantum computing in the development of semiconductor materials. By developing quantum algorithms that can simulate the light-matter interactions central to EUV lithography, both companies aim to strengthen the science underpinning photoresist design at leading-edge foundries.
The work is intended to support Xanadu’s broader aims in the field of quantum hardware and software, as the company continues its development of quantum computing technology for a range of potential applications.