{"id":43294,"date":"2025-04-23T07:54:12","date_gmt":"2025-04-23T07:54:12","guid":{"rendered":"https:\/\/www.europesays.com\/uk\/43294\/"},"modified":"2025-04-23T07:54:12","modified_gmt":"2025-04-23T07:54:12","slug":"high-quality-factor-viscoelastic-nanomechanical-resonators-from-moire-superlattices","status":"publish","type":"post","link":"https:\/\/www.europesays.com\/uk\/43294\/","title":{"rendered":"High-quality-factor viscoelastic nanomechanical resonators from moir\u00e9 superlattices"},"content":{"rendered":"<p>Large TBG drumhead resonators<\/p>\n<p>The TBG drumhead nanomechanical resonators are prepared by a \u2018tear-and-stack\u2019 method using both wet and dry transfer techniques (see Methods). Supplementary Table\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S1<\/a> presents our devices based on their size, their twist angle, and the transfer technique we have used. Figure\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig1\" target=\"_blank\" rel=\"noopener\">1<\/a>a displays the TBG drums, suspended over cylindrical cavities, that we have investigated. They are labelled as drum 1 (diameter D\u00a0=\u00a06\u2009\u03bcm), drum 2 (D\u00a0=\u00a08\u2009\u03bcm) and drum 3 (D\u00a0=\u00a012\u2009\u03bcm) in Device A. A moderate twist angle \u03b8\u00a0~\u00a012\u00b0 was set during the fabrication and extracted from micro-Raman spectroscopy measurements (see Methods). To drive the flexural vibrations of the drums, a time-dependent gate voltage is applied to the Ti\/Au leads as shown in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig1\" target=\"_blank\" rel=\"noopener\">1<\/a>b. The DC component of the resulting force allows us to control the static deflection \u03be and the deflection-induced in-plane stress and strain, while the AC voltage provides a harmonic driving force that actuates the TBG drums. A single laser beam is used to interferometrically measure the mechanical responses of the TBG drums and to simultaneously record the micro-Raman scattering responses of the membrane<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 35\" title=\"Zhang, X. et al. Dynamically-enhanced strain in atomically thin resonators. Nat. Commun. 11, 5526 (2020).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR35\" id=\"ref-link-section-d105669588e794\" target=\"_blank\" rel=\"noopener\">35<\/a>. All measurements are performed at room temperature under high vacuum (see Methods).<\/p>\n<p><b id=\"Fig1\" class=\"c-article-section__figure-caption\" data-test=\"figure-caption-text\">Fig. 1: Characterisations of TBG drum and butterfly-shaped hysteresis loop.<\/b><a class=\"c-article-section__figure-link\" data-test=\"img-link\" data-track=\"click\" data-track-label=\"image\" data-track-action=\"view figure\" href=\"https:\/\/www.nature.com\/articles\/s41467-025-58981-2\/figures\/1\" rel=\"nofollow noopener\" target=\"_blank\"><img decoding=\"async\" aria-describedby=\"Fig1\" src=\"https:\/\/www.europesays.com\/uk\/wp-content\/uploads\/2025\/04\/41467_2025_58981_Fig1_HTML.png\" alt=\"figure 1\" loading=\"lazy\" width=\"685\" height=\"284\"\/><\/a><\/p>\n<p><b>a<\/b> Optical image of Device A with three TBG drums (1, 2, 3) contacted by a Ti\/Au lead. The right panel shows the schematics of the moir\u00e9 pattern formed by a twist angle of \u03b8\u00a0~\u00a012\u00b0, where alternating AA, AB and, BA stacked regions appear (scale bar: 1\u2009nm). <b>b<\/b> Sketch of our experiment combining electrostatic actuation, optical displacement readout, and micro-Raman spectroscopy. The TBG (with its static displacement \u03be) is represented by the dark blue dashed line; its flexural motion is sketched in light blue. M, LEF, and APD represent a mirror, a long-pass edge filter, and an avalanche photodiode, respectively. <b>c<\/b> Raman spectrum of TBG measured at the centre of drum 2 (D\u00a0=\u00a08\u2009\u03bcm) by excitation at 532 nm plus the extended spectral region for the \\({{{{\\rm{R}}}}}^{{\\prime} }\\) mode. Inset: a mini-Brillouin zone with a twist angle dependent lattice vector q(\u03b8). <b>d<\/b> The frequencies of the G and the \\({{{{\\rm{R}}}}}^{{\\prime} }\\) modes extracted from Raman spectra measured with Vdc varying from \u00a0\u2212\u00a09 V to 0 V. The straight dashed line is a guide for the eye. Error bars are extracted from the fits to the Raman spectra. <b>e<\/b> The resonant mechanical response measured in drum 3 (D\u00a0=\u00a012\u2009\u03bcm) at Vdc\u00a0=\u00a0\u2212\u00a010 V shows a large Q of \u00a0~\u00a01900 at room temperature. <b>f<\/b> Mechanical frequency responses measured with Vdc undergoing the forward-then-backward sweep sequence (indicated by arrows), forming a butterfly-shaped hysteresis loop.<\/p>\n<p>We first estimate \u03b8 from the moir\u00e9 superlattice-activated Raman mode. Figure\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig1\" target=\"_blank\" rel=\"noopener\">1<\/a>c shows the Raman spectrum of the suspended TBG measured at the centre of drum 2 with a 532 nm excitation (see Methods), which shows two main features: the strong G mode and the weak \\({{{{\\rm{R}}}}}^{{\\prime} }\\) mode, arising from the zone-centred (i.e., zero momentum) phonons and the moir\u00e9 superlattice-activated phonons with momentum \\(q(\\theta )=\\frac{8\\pi }{\\sqrt{3}a}\\sin (\\frac{\\theta }{2})\\) (as shown in the inset to Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig1\" target=\"_blank\" rel=\"noopener\">1<\/a>c), respectively. The value of \u03b8 is extracted from the frequency of the \\({{{{\\rm{R}}}}}^{{\\prime} }\\) mode, which is close to the target value specified in the fabrications. Figure\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig1\" target=\"_blank\" rel=\"noopener\">1<\/a>d shows the positions of the \\({{{{\\rm{R}}}}}^{{\\prime} }\\) mode and of the G mode as the gate voltage Vdc decreases from 0 V to \u00a0\u2212\u00a09 V. Surprisingly, both modes are less sensitive to Vdc, within our experimental accuracy, than the G mode in monolayer graphene (MLG)<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 35\" title=\"Zhang, X. et al. Dynamically-enhanced strain in atomically thin resonators. Nat. Commun. 11, 5526 (2020).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR35\" id=\"ref-link-section-d105669588e1131\" target=\"_blank\" rel=\"noopener\">35<\/a>. Meanwhile, the intensity of the G mode remains almost unchanged for Vdc down to \u00a0\u2212\u00a05 V before decreasing by \u00a0~\u00a010% at Vdc\u00a0=\u00a0\u2212\u00a09 V (see Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S1<\/a>c and Methods). These observations indicate that the Vdc-induced tensile strain is negligible compared to the initial built-in strain (\u03f50), which means that our TBG drums are under high tensile stress.<\/p>\n<p>Large Q at room temperature<\/p>\n<p>Figure\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig1\" target=\"_blank\" rel=\"noopener\">1<\/a>e shows the mechanical response of drum 3 (D\u00a0=\u00a012\u2009\u03bcm) at Vdc\u00a0=\u00a0\u2212\u00a010 V. The resonant frequency fr and corresponding Q are extracted by fitting a linear harmonic resonator model to the measured response (see Methods). The largest Q we measure reaches \u00a0~\u00a01900 at room temperature, more than one order of magnitude higher than Q in graphene resonators at room temperature<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 9\" title=\"Xu, B. et al. Nanomechanical resonators: Toward atomic scale. ACS Nano 16, 15545 (2022).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR9\" id=\"ref-link-section-d105669588e1194\" target=\"_blank\" rel=\"noopener\">9<\/a>. Note that such large Q appears at the gate voltage far from the near-zero DC bias, in contrast to graphene resonators<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 35\" title=\"Zhang, X. et al. Dynamically-enhanced strain in atomically thin resonators. Nat. Commun. 11, 5526 (2020).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR35\" id=\"ref-link-section-d105669588e1202\" target=\"_blank\" rel=\"noopener\">35<\/a>. We observe that resonances with unusually large Q exhibit a butterfly-shaped hysteresis loop as the gate voltage is cycled.<\/p>\n<p>Butterfly-shaped hysteresis loop<\/p>\n<p>To measure the hysteretic nanomechanical responses, we increase and decrease the gate voltage in cycles. Figure\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig1\" target=\"_blank\" rel=\"noopener\">1<\/a>f shows the amplitude response as a function of drive frequency and Vdc under a forward-then-backward sweep between Vdc\u2009=\u2009\u00b1\u00a09.5\u2009V, forming a butterfly-shaped hysteresis loop that crosses at Vdc\u00a0=\u00a00 V (white-dashed arrows in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig1\" target=\"_blank\" rel=\"noopener\">1<\/a>f). Within the butterfly-shaped hysteresis loop, fr increases by only \u00a0~\u00a05%, which is far less than the typical value of \u00a0~\u00a050% in the low-tensioned MLG drum<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 35\" title=\"Zhang, X. et al. Dynamically-enhanced strain in atomically thin resonators. Nat. Commun. 11, 5526 (2020).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR35\" id=\"ref-link-section-d105669588e1240\" target=\"_blank\" rel=\"noopener\">35<\/a>. Note that all of the mechanical data in this study are from drum 2 in Device A unless otherwise stated. The butterfly-shaped hysteresis loop also shrinks as the sweep range decreases (Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S5<\/a>a). We find that such viscoelastic responses can be controllably obtained by specifying \u03b8 close to 15\u00b0 in our TBG drums, whereas the TBG with \u03b8\u2009=\u20090\u00b0 does not show a butterfly-shaped hysteresis loop. Supplementary Section\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S3<\/a> provides the statistics on the hysteresis loops of our TBG drums with increasing \u03b8. It suggests that the viscoelasticity in TBG drums is angle-dependent, as we discuss below.<\/p>\n<p>Viscoelastic behaviours<\/p>\n<p>To study the dependence of the shape of the frequency loop on the step rate dVdc\/dt, in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig2\" target=\"_blank\" rel=\"noopener\">2<\/a>a we show the hysteresis loops measured at three different values of dVdc\/dt. They have been recorded in a backward-then-forward sequence with a step size of 0.25 V. Remarkably, the maximal fr reached by the loop is revealed with the slow step rate. Furthermore, the width of the hysteresis loop, \u0394Vdc, defined by the largest Vdc shift between the forward and backward traces, shows a non-linear monotonic increase with increasing dVdc\/dt, as shown by the experimental data in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig2\" target=\"_blank\" rel=\"noopener\">2<\/a>d.<\/p>\n<p><b id=\"Fig2\" class=\"c-article-section__figure-caption\" data-test=\"figure-caption-text\">Fig. 2: Rate and time dependent hysteresis loops and gate tuning of the quality factors Q.<\/b><a class=\"c-article-section__figure-link\" data-test=\"img-link\" data-track=\"click\" data-track-label=\"image\" data-track-action=\"view figure\" href=\"https:\/\/www.nature.com\/articles\/s41467-025-58981-2\/figures\/2\" rel=\"nofollow noopener\" target=\"_blank\"><img decoding=\"async\" aria-describedby=\"Fig2\" src=\"https:\/\/www.europesays.com\/uk\/wp-content\/uploads\/2025\/04\/41467_2025_58981_Fig2_HTML.png\" alt=\"figure 2\" loading=\"lazy\" width=\"685\" height=\"500\"\/><\/a><\/p>\n<p><b>a<\/b> Resonant frequency loops at different step rates, dVdc\/dt. \u25cb, \u25a1, \u2662 correspond to a slow, medium, and fast step rate, respectively. The arrows indicate the direction of the sweep. <b>b<\/b> Schematic of the flexural drum vibration (top panel) and the reduced viscoelastic model (bottom panel). The membrane flexural motion is modelled by a mass (M) connected to a spring (k) and a dashpot (\u03b7s) in parallel (Kelvin-Voigt model) to include the effects of viscoelasticity. D is the diameter of the drum. <b>c<\/b> Experimental and fitted (\u03f50\u2009=\u20092.67\u2009\u00d7\u200910\u22124 and \u03b7s\u2009=\u200910.5\u2009\u00d7\u20091015\u2009Pa\u2009s) resonant frequency loop under the slow stepping rate (\u25cb). <b>d<\/b> Experimental and calculated \u0394Vdc as a function of dVdc\/dt. <b>e<\/b> Evolution of fr and Q upon repeating the forward-then-backward step sweep of Vdc in three consecutive rounds (1st, 2nd, 3rd) for two traces (trace 1 and trace 2) corresponding to different initialisations. ts is the time interval (only denoted between two different rounds) when the step direction is reversed.<\/p>\n<p>Below we consider various mechanisms that may explain our observations. We rule out contamination as the origin of the viscoelastic behaviour by reproducing the hysteresis loop on optimally clean TBG drums fabricated by the all-dry transfer method (see Supplementary section\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S1.4<\/a> for surface characterization by atomic force microscopy). Euler instabilities<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 36\" title=\"Lifshitz, R. &amp; Cross, M. C. Nonlinear dynamics of nanomechanical and micromechanical resonators, in Reviews of Nonlinear Dynamics and Complexity (John Wiley &amp; Sons, Ltd, 2008) Chap. 1, pp. 1&#x2013;52.\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR36\" id=\"ref-link-section-d105669588e1411\" target=\"_blank\" rel=\"noopener\">36<\/a> and mechanically conservative nonlinearities<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 36\" title=\"Lifshitz, R. &amp; Cross, M. C. Nonlinear dynamics of nanomechanical and micromechanical resonators, in Reviews of Nonlinear Dynamics and Complexity (John Wiley &amp; Sons, Ltd, 2008) Chap. 1, pp. 1&#x2013;52.\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR36\" id=\"ref-link-section-d105669588e1415\" target=\"_blank\" rel=\"noopener\">36<\/a>, which would also give rise to hysteresis frequency loops, can be safely ruled out. Nonlinearities can be disregarded because the shape of our frequency loops does not depend on the strength of the driving force (Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S9<\/a>). Sliding motion at the clamping points can also be excluded because such a sliding produces a plateau for fr near the switching points<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 37\" title=\"Ying, Y. et al. Sliding nanomechanical resonators. Nat. Commun. 13, 6392 (2022).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR37\" id=\"ref-link-section-d105669588e1427\" target=\"_blank\" rel=\"noopener\">37<\/a>.<\/p>\n<p>Alternatively, a process that may account for our observations is a viscoelastic one. We model the TBG drums as a spring and a dashpot connected in parallel (Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig2\" target=\"_blank\" rel=\"noopener\">2<\/a>b), known as the Kelvin-Voigt model (KVM), to include the effects of viscoelasticity<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 1\" title=\"Lakes, R. S.Viscoelastic Materials (Cambridge University Press, Cambridge, 2009).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR1\" id=\"ref-link-section-d105669588e1437\" target=\"_blank\" rel=\"noopener\">1<\/a>. The constitutive relation is expressed as a first-order linear differential equation, \\(\\sigma=E(\\epsilon+{\\tau }_{\\sigma }\\frac{{{{\\rm{d}}}}\\epsilon }{{{{\\rm{d}}}}t}\\, )\\), where \u03c3 is stress, \u03f5 is strain, E is Young\u2019s modulus, \u03c4\u03c3\u00a0=\u00a0\u03b7\/E is the relaxation time, with \u03b7 the viscosity of the material. Based on this constitutive equation, the resonant frequency of TBG drums is expressed as (see Methods):<\/p>\n<p>$${f}_{{{{\\rm{r}}}}}=\\frac{1}{2\\pi }\\sqrt{\\frac{E}{4{m}_{{{{\\rm{eff}}}}}{D}^{2}}({k}_{0}+{k}_{{{{\\rm{s}}}}})}$$<\/p>\n<p>\n                    (1)\n                <\/p>\n<p>with the normal term \\({k}_{0}=2{\\epsilon }_{0}+\\frac{3}{2}{z}^{2}\\), the viscoelastic term \\({k}_{{{{\\rm{s}}}}}=\\frac{3}{2}{\\tau }_{\\sigma {{{\\rm{s}}}}}z\\frac{{{{\\rm{d}}}}z}{{{{\\rm{d}}}}t}\\), where z\u2009=\u2009\u03be\/D is the dimensionless deflection at the centre of the drum, \u03f50 is the built-in strain, \u03c4\u03c3s\u2009=\u2009\u03b7s\/E with \u03b7s the viscosity of the dashpot, and meff is the effective mass of the vibrational mode. The dynamical equation of motion for z can be constructed from the force equilibrium relation (see Methods). The parameters obtained by numerically solving the dynamical equation are plugged into Eq. (<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"equation anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Equ1\" target=\"_blank\" rel=\"noopener\">1<\/a>) to calculate fr. Using these experimental parameters, the KVM reproduces the shape of the frequency loops well, as shown in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig2\" target=\"_blank\" rel=\"noopener\">2<\/a>c for a slow step rate (see Supplementary section\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S2.2<\/a> for the fits to butterfly-shaped loops and the stepping-dependent butterfly-shaped loops). The model also reproduces the relationship between \u0394Vdc and dVdc\/dt (Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig2\" target=\"_blank\" rel=\"noopener\">2<\/a>d). The implications of the non-linear relationship revealed in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig2\" target=\"_blank\" rel=\"noopener\">2<\/a>d are twofold: first, \u0394Vdc will decrease to zero for an extremely slow rate, namely without any hysteresis loop; second, \u0394Vdc will saturate for a fast rate, corresponding to the case where the dynamic system can not follow the external stimuli. Therefore, the time dependence of fr is slow on the scale of the ring-down time and on the scale of the vibrational period.<\/p>\n<p>To gain an intuitive understanding of the behaviour of TBG drums as the gate voltage is cycled, we estimate the damping force, \\({F}_{{{{\\rm{d}}}}}=S\\cdot {\\eta }_{{{{\\rm{s}}}}}\\frac{{{{\\rm{d}}}}\\epsilon }{{{{\\rm{d}}}}t}\\approx 1.859\\times 1{0}^{-4}\\) N, with S the surface area of the drum and viscous energy losses \\({E}_{{{{\\rm{v}}}}}=S\\cdot \\oint {\\eta }_{{{{\\rm{s}}}}}\\frac{{{{\\rm{d}}}}\\epsilon }{{{{\\rm{d}}}}t}\\,{{{\\rm{d}}}}\\epsilon \\approx 1.41\\times 1{0}^{-13}\\) J, based on the frequency loop in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig2\" target=\"_blank\" rel=\"noopener\">2<\/a>c which we fit with two parameters, namely \u03f50\u00a0=\u00a02.67\u00a0\u00d7\u00a010\u22124 and \u03b7s\u00a0=\u00a010.5\u00a0\u00d7\u00a01015 Pa\u00a0s, yielding \u03c4\u03c3s\u00a0\u2248\u00a0104 s. Our damping force corresponds to a shear stress \u03b3\u00a0=\u00a0Fd\/S\u00a0\u2248\u00a03.7 MPa, which is larger than in bilayer graphene<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 38\" title=\"Wang, G. et al. Measuring interlayer shear stress in bilayer graphene. Phys. Rev. Lett. 119, 036101 (2017).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR38\" id=\"ref-link-section-d105669588e2163\" target=\"_blank\" rel=\"noopener\">38<\/a>, but comparable to that in twisted MoS2<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 39\" title=\"Sun, Y. et al. Determining the interlayer shearing in twisted bilayer MoS2 by nanoindentation. Nat. Commun. 13, 3898 (2022).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR39\" id=\"ref-link-section-d105669588e2168\" target=\"_blank\" rel=\"noopener\">39<\/a>. The proportions of k0 and ks corresponding to Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig1\" target=\"_blank\" rel=\"noopener\">1<\/a>e and Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig2\" target=\"_blank\" rel=\"noopener\">2<\/a>c are provided in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S6<\/a>b and Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S7<\/a>c, respectively. We find that the increase in fr within the frequency loop can be fully accounted for by the viscoelastic spring constant ks. For drum 4 in Device B where Vdc is cycled between \u00a0\u2212\u00a05 V and \u00a0\u2212\u00a01 V, we obtain \u03f50\u00a0=\u00a03.82\u00a0\u00d7\u00a010\u22124, \u03b7s\u00a0=\u00a08.9\u00a0\u00d7\u00a01015 Pa\u00a0s, \u03c4\u03c3s\u00a0\u2248\u00a0104 s, Fd\u00a0\u2248\u00a02.867\u00a0\u00d7\u00a010\u22124 N, Ev\u00a0=\u00a06.1\u00a0\u00d7\u00a010\u221214 J, and \u03b3\u00a0\u2248\u00a02.5 MPa.<\/p>\n<p>We further test the dynamic nature of the system by repeating the backward-then-forward sweeps in three consecutive rounds, as shown in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig2\" target=\"_blank\" rel=\"noopener\">2<\/a>e. Two traces are recorded, corresponding to different initial fr. A slow convergence to a steady state, where a perfect loop, i.e., with no gaps or crossings at the switching points, is observed in the third round. Trace 2 shows a much smoother path as its initial fr closed to the steady state.<\/p>\n<p>Furthermore, within a resonant frequency loop, we find that Q follows fr, both increasing and decreasing concomitantly. The tunability of Q shows an approximately linear increase as decreasing gate voltage (Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig2\" target=\"_blank\" rel=\"noopener\">2<\/a>e). Such enhancements of Q are expected to depend on the gate voltage stepping rate (see Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S11<\/a>a) via ks as discussed above. These observations are in stark contrast to the conventional phenomena for 2-D nanoelectromechanical resonators, where the Q decreases rapidly with increasing electrostatic pressure, which is still a subject of debate<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 35\" title=\"Zhang, X. et al. Dynamically-enhanced strain in atomically thin resonators. Nat. Commun. 11, 5526 (2020).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR35\" id=\"ref-link-section-d105669588e2290\" target=\"_blank\" rel=\"noopener\">35<\/a>.<\/p>\n<p>Viscoelastic dissipation dilution<\/p>\n<p>To explore the mechanism of energy dissipation related to high-frequency mechanical vibrations (tens of MHz), in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig3\" target=\"_blank\" rel=\"noopener\">3<\/a>a we show Q extracted from the frequency loop corresponding to Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig2\" target=\"_blank\" rel=\"noopener\">2<\/a>c, where the linear increments with slightly different slopes are revealed for forward and backward sweeps with a step size of 0.25 V. The different increments in Q under other step rates are given in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S11<\/a>a. Figure\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig3\" target=\"_blank\" rel=\"noopener\">3<\/a>b summarises Q as a function of Vdc for three drums in Device A. The large drum tends to have a large Q, which is consistent with many reports in the literature<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 40\" title=\"Barton, R. A. et al. High, size-dependent quality factor in an array of graphene mechanical resonators. Nano Lett. 11, 1232 (2011).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR40\" id=\"ref-link-section-d105669588e2332\" target=\"_blank\" rel=\"noopener\">40<\/a>. There are also a few jumps in Q, as shown in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig3\" target=\"_blank\" rel=\"noopener\">3<\/a>b for drum 3 under a large gate voltage sweep. Such an observation may suggest the existence of further stick-slip actions beyond the atomic scale<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 41\" title=\"Zhang, S. et al. Dual-scale stick-slip friction on graphene\/hBN moir&#xE9; superlattice structure. Phys. Rev. Lett. 128, 226101 (2022).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR41\" id=\"ref-link-section-d105669588e2343\" target=\"_blank\" rel=\"noopener\">41<\/a>.<\/p>\n<p><b id=\"Fig3\" class=\"c-article-section__figure-caption\" data-test=\"figure-caption-text\">Fig. 3: Viscoelastic dissipation dilution.<\/b><a class=\"c-article-section__figure-link\" data-test=\"img-link\" data-track=\"click\" data-track-label=\"image\" data-track-action=\"view figure\" href=\"https:\/\/www.nature.com\/articles\/s41467-025-58981-2\/figures\/3\" rel=\"nofollow noopener\" target=\"_blank\"><img decoding=\"async\" aria-describedby=\"Fig3\" src=\"https:\/\/www.europesays.com\/uk\/wp-content\/uploads\/2025\/04\/41467_2025_58981_Fig3_HTML.png\" alt=\"figure 3\" loading=\"lazy\" width=\"685\" height=\"318\"\/><\/a><\/p>\n<p><b>a<\/b> Quality factors Q corresponding to Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig2\" target=\"_blank\" rel=\"noopener\">2<\/a>c for both forward and backward sweeps. <b>b<\/b> Q extracted from the mechanical response spectra and as a function of Vdc for drum 1 (D\u00a0=\u00a06\u2009\u03bcm), drum 2 (D\u00a0=\u00a08\u2009\u03bcm) and drum 3 (D\u00a0=\u00a012\u2009\u03bcm), respectively. The dashed arrows denote the Q jumps revealed in drum 3. The solid lines in (<b>a, b<\/b>) are linear fits to the experimental data (see Supplementary section\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S2.2<\/a>). <b>c<\/b> Top panel: the extended Kelvin-Voigt model, i.e., the intrinsic friction dashpot \u03b7i is added in parallel to the model that has been introduced in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig2\" target=\"_blank\" rel=\"noopener\">2<\/a>b, but here \u03b7s is explicitly replaced by a \u201clossless&#8221; viscoelastic spring ks. Bottom panel: a cartoon of the Prandtl-Tomlison model, where the tip slides on top of a one-dimensional chain of springs, which moves on top of a fixed potential. <b>d<\/b> The Vdc-dependent Q extracted from the ring-down measurements (Ring.) and fitting of the mechanical responses (M.R.) in drum 11 (D\u00a0=\u00a012\u2009\u03bcm) of Device E. Error bars in the traces of Ring. and M.R. are extracted from the fits of energy decay and mechanical responses, respectively. Note that the ringdown trace has been shifted up by 50 for direct comparison (see Methods). <b>e<\/b> Energy decay traces (in log scale) at different Vdc in drum 11 (D\u2009=\u200912\u2009\u03bcm) of Device E (see Methods).<\/p>\n<p>Firstly, we use our estimates of \u03b7s and \u03f50 to estimate the contribution of dissipation dilution in our measurements. The phenomenon of dissipation dilution refers to the reduction in energy dissipation from the contribution of a lossless potential that stores part of the elastic energy of mechanical resonators. The lossless potential may originate from e.g., a geometrical nonlinear deformation<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 12\" title=\"Engelsen, N. J., Beccari, A. &amp; Kippenberg, T. J. Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution. Nat. Nanotechnol. 19, 725 (2024).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR12\" id=\"ref-link-section-d105669588e2475\" target=\"_blank\" rel=\"noopener\">12<\/a>. Such dissipation dilution could not explain our observations, since the small elastic energy increments are fully accounted for by the viscoelastic term ks in Eq. (<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"equation anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Equ1\" target=\"_blank\" rel=\"noopener\">1<\/a>). However, due to a long viscoelastic relaxation time (\u03c4\u03c3s\u2009\u2248\u2009104\u2009s for drum 2) compared to the vibrational period \u00a0\u2248\u00a010\u22125 s, such a term can play a similar role as that of a nonlinear deformation to store elastic energy and contribute a \u201clossless&#8221; spring constant ks within the period of the oscillator. In order to provide an intuitive picture, we propose an extended KVM (Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig3\" target=\"_blank\" rel=\"noopener\">3<\/a>c, top panel), where the intrinsic dissipation is modelled by a new dashpot (\u03b7i) in parallel to the spring (k0) and viscoelastic dashpot (\u03b7s) that have been introduced in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig2\" target=\"_blank\" rel=\"noopener\">2<\/a>b, but here \u03b7s has been replaced by ks. The intrinsic Q can be defined by the material loss tangent, Qint\u2009=\u20091\/tan(\u03d5), where \u03d5 is the phase lag between stress and strain. Q is characterised by Q\u2009=\u2009DQ\u2009\u00d7\u2009Qint, where DQ\u00a0=\u00a0(1\u2009+\u2009ks\/k0) is called the dilution coefficient. Based on the outputs from KVM (see Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S7<\/a>), DQ\u2009\u2248\u20091.06 is found for Vdc\u2009=\u2009\u22129.5\u2009V as compared to Vdc\u2009=\u2009\u22126\u2009V, which is less than the experimental DQ\u00a0\u2248\u00a01.20 (forward) and DQ\u00a0\u2248\u00a01.22 (backward), as shown in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig3\" target=\"_blank\" rel=\"noopener\">3<\/a>a.<\/p>\n<p>We further estimate the impacts of ks on intrinsic damping rate \u0393\u00a0=\u00a0f\/Qint, which is not included in the conventional model of dissipation dilution<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 12\" title=\"Engelsen, N. J., Beccari, A. &amp; Kippenberg, T. J. Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution. Nat. Nanotechnol. 19, 725 (2024).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR12\" id=\"ref-link-section-d105669588e2627\" target=\"_blank\" rel=\"noopener\">12<\/a>. The extracted \u0393 corresponding to Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig3\" target=\"_blank\" rel=\"noopener\">3<\/a>b is shown in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S10<\/a>a. Notably, three drums in Device A follow a similar slope of \u00a0~\u00a03 kHz V\u22121. Intrinsic damping arises from the atomic-scale stick-slip behaviour that gives rise to friction. It is commonly interpreted by the Prandtl-Tomlinson model, where a particle is pulled by a linear spring of stiffness kd to slide on a periodic energy landscape (Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig3\" target=\"_blank\" rel=\"noopener\">3<\/a>c, bottom panel). The stick-slip action only occurs if the corrugation registration energy is large enough, i.e., 2E0\u03c02\/kdb2\u00a0&gt;\u00a01, where E0 and b are the amplitude and period of the energy corrugation<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 42\" title=\"Socoliuc, A., Bennewitz, R., Gnecco, E. &amp; Meyer, E. Transition from stick-slip to continuous sliding in atomic friction: Entering a new regime of ultralow friction. Phys. Rev. Lett. 92, 134301 (2004).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR42\" id=\"ref-link-section-d105669588e2672\" target=\"_blank\" rel=\"noopener\">42<\/a>. Otherwise, the stick-slip behaviour would undergo the transition to continuous motion without dissipation, thus reducing \u0393. The viscoelastic stiffness ks creates a lateral, time-dependent heterostrain that makes the atom slide on a lattice (Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig3\" target=\"_blank\" rel=\"noopener\">3<\/a>c, bottom panel), and as such can be considered as a driving kd. The sliding resistance can be reduced or even eliminated by increasing ks by Vdc, reinforcing the effect of dissipation dilution.<\/p>\n<p>Our mechanism of reinforced viscoelastic dissipation dilution is markedly different from the electrical tuning of Q in nanotubes<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 43\" title=\"Steele, G. A. et al. Strong coupling between single-electron tunneling and nanomechanical motion. Science 325, 1103 (2009).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR43\" id=\"ref-link-section-d105669588e2706\" target=\"_blank\" rel=\"noopener\">43<\/a>,<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 44\" title=\"Lassagne, B., Tarakanov, Y., Kinaret, J., Garcia-Sanchez, D. &amp; Bachtold, A. Coupling mechanics to charge transport in carbon nanotube mechanical resonators. Science 325, 1107 (2009).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR44\" id=\"ref-link-section-d105669588e2709\" target=\"_blank\" rel=\"noopener\">44<\/a>. It is also different from the electrical tuning of Q in graphene due to Ohmic dissipation, where Q decreases as \u2223Vdc\u2223 increases<a data-track=\"click\" data-track-action=\"reference anchor\" data-track-label=\"link\" data-test=\"citation-ref\" aria-label=\"Reference 45\" title=\"Song, X. et al. Stamp transferred suspended graphene mechanical resonators for radio frequency electrical readout. Nano Lett. 12, 198 (2012).\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#ref-CR45\" id=\"ref-link-section-d105669588e2724\" target=\"_blank\" rel=\"noopener\">45<\/a>. Because our measurements do not involve charge transport through the resonator, we believe that the phenomena we observe have a purely mechanical origin. Remarkably, a transition from the purely mechanical region with enhanced Q to the usual electrostatic region with decreased Q as increasing \u2223Vdc\u2223 is revealed for with \u03b8\u00a0~\u00a04\u00b0 (Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig3\" target=\"_blank\" rel=\"noopener\">3<\/a>d), with \u03b8\u00a0~\u00a010.\u00a05\u00b0 (Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S16<\/a>d) and another drum of \u03b8\u00a0~\u00a012\u00b0 (Device G) with a small built-in strain introduced by annealing (Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"supplementary material anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#MOESM1\" target=\"_blank\" rel=\"noopener\">S8<\/a>i). In fact, we can separate the dissipation as 1\/Q\u00a0=\u00a01\/Qnormal\u2009+\u20091\/Qviscoelastic. Thus, if the normal term competes with the viscoelastic one, either by reducing \u03f50 as in Device G or by reducing viscosity in the case of a small twist angle (Device E), the electrostatic region with decreased Q returns.<\/p>\n<p>To obtain the direct information on the dissipation dynamics, we further perform the ring-down measurements (see Methods) in drum 11 of Device E. The vibrational amplitude at resonant frequency decays exponentially in time as \u221d e\u2212t\/(2\u03c4) upon stopping the drive, with \u03c4 the decay time constant, which gives Q\u00a0=\u00a02\u03c0fr\u03c4. The energy decay traces (in log scale) corresponding to different Vdc are shown in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig3\" target=\"_blank\" rel=\"noopener\">3<\/a>e. Q obtained from the ring-down measurements is identical to the trajectory extracted by fitting of the mechanical responses (Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig3\" target=\"_blank\" rel=\"noopener\">3<\/a>d). Further controlled ring-down measurements using gate voltage pulses or tiny ramps to capture the discrete Q jumps (as shown in Fig.\u00a0<a data-track=\"click\" data-track-label=\"link\" data-track-action=\"figure anchor\" href=\"http:\/\/www.nature.com\/articles\/s41467-025-58981-2#Fig3\" target=\"_blank\" rel=\"noopener\">3<\/a>b) are needed to elucidate the underlying mechanism.<\/p>\n","protected":false},"excerpt":{"rendered":"Large TBG drumhead resonators The TBG drumhead nanomechanical resonators are prepared by a \u2018tear-and-stack\u2019 method using both wet&hellip;\n","protected":false},"author":2,"featured_media":43295,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[3845],"tags":[3965,17354,24114,3966,24115,24116,74,24117,70,17353,16,15],"class_list":{"0":"post-43294","1":"post","2":"type-post","3":"status-publish","4":"format-standard","5":"has-post-thumbnail","7":"category-physics","8":"tag-humanities-and-social-sciences","9":"tag-interfaces-and-thin-films","10":"tag-mechanical-and-structural-properties-and-devices","11":"tag-multidisciplinary","12":"tag-nems","13":"tag-optomechanics","14":"tag-physics","15":"tag-raman-spectroscopy","16":"tag-science","17":"tag-surfaces","18":"tag-uk","19":"tag-united-kingdom"},"share_on_mastodon":{"url":"https:\/\/pubeurope.com\/@uk\/114386204424481158","error":""},"_links":{"self":[{"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/posts\/43294","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/comments?post=43294"}],"version-history":[{"count":0,"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/posts\/43294\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/media\/43295"}],"wp:attachment":[{"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/media?parent=43294"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/categories?post=43294"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/tags?post=43294"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}