{"id":470552,"date":"2025-10-03T07:43:13","date_gmt":"2025-10-03T07:43:13","guid":{"rendered":"https:\/\/www.europesays.com\/uk\/470552\/"},"modified":"2025-10-03T07:43:13","modified_gmt":"2025-10-03T07:43:13","slug":"towards-terahertz-nanomechanics-nature-communications","status":"publish","type":"post","link":"https:\/\/www.europesays.com\/uk\/470552\/","title":{"rendered":"Towards terahertz nanomechanics | Nature Communications"},"content":{"rendered":"<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"1.\">\n<p class=\"c-article-references__text\" id=\"ref-CR1\">Pawar, A. Y., Sonawane, D. D., Erande, K. B. &amp; Derle, D. V. Terahertz technology and its applications. Drug Invent. Today <b>5<\/b>, 157\u2013163 (2013).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1016\/j.dit.2013.03.009\" data-track-item_id=\"10.1016\/j.dit.2013.03.009\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1016%2Fj.dit.2013.03.009\" aria-label=\"Article reference 1\" data-doi=\"10.1016\/j.dit.2013.03.009\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 1\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Terahertz%20technology%20and%20its%20applications&amp;journal=Drug%20Invent.%20Today&amp;doi=10.1016%2Fj.dit.2013.03.009&amp;volume=5&amp;pages=157-163&amp;publication_year=2013&amp;author=Pawar%2CAY&amp;author=Sonawane%2CDD&amp;author=Erande%2CKB&amp;author=Derle%2CDV\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"2.\">\n<p class=\"c-article-references__text\" id=\"ref-CR2\">Shen, S. et al. Recent advances in the development of materials for terahertz metamaterial sensing. Adv. Optical Mater. <b>10<\/b>, 2101008 (2022).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1002\/adom.202101008\" data-track-item_id=\"10.1002\/adom.202101008\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1002%2Fadom.202101008\" aria-label=\"Article reference 2\" data-doi=\"10.1002\/adom.202101008\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BB3MXit1Oiu7vP\" aria-label=\"CAS reference 2\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 2\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Recent%20advances%20in%20the%20development%20of%20materials%20for%20terahertz%20metamaterial%20sensing&amp;journal=Adv.%20Optical%20Mater.&amp;doi=10.1002%2Fadom.202101008&amp;volume=10&amp;publication_year=2022&amp;author=Shen%2CS\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"3.\">\n<p class=\"c-article-references__text\" id=\"ref-CR3\">Naftaly, M., Vieweg, N. &amp; Deninger, A. Industrial applications of terahertz sensing: State of play. Sensors <b>19<\/b>, 4203 (2019).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.3390\/s19194203\" data-track-item_id=\"10.3390\/s19194203\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.3390%2Fs19194203\" aria-label=\"Article reference 3\" data-doi=\"10.3390\/s19194203\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2019Senso..19.4203N\" aria-label=\"ADS reference 3\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=31569789\" aria-label=\"PubMed reference 3\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed central reference\" data-track-action=\"pubmed central reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/pmc\/articles\/PMC6806174\" aria-label=\"PubMed Central reference 3\" target=\"_blank\">PubMed Central<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BB3cXpsFWmurk%3D\" aria-label=\"CAS reference 3\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 3\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Industrial%20applications%20of%20terahertz%20sensing%3A%20State%20of%20play&amp;journal=Sensors&amp;doi=10.3390%2Fs19194203&amp;volume=19&amp;publication_year=2019&amp;author=Naftaly%2CM&amp;author=Vieweg%2CN&amp;author=Deninger%2CA\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"4.\">\n<p class=\"c-article-references__text\" id=\"ref-CR4\">Amini, T., Jahangiri, F., Ameri, Z. &amp; Hemmatian, M. A. A review of feasible applications of THz waves in medical diagnostics and treatments. J. Lasers Med. Sci. <b>12<\/b>, (2021).<\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"5.\">\n<p class=\"c-article-references__text\" id=\"ref-CR5\">Kawano, Y. Terahertz waves: a tool for condensed matter, the life sciences and astronomy. Contemp. Phys. <b>54<\/b>, 143\u2013165 (2013).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1080\/00107514.2013.817194\" data-track-item_id=\"10.1080\/00107514.2013.817194\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1080%2F00107514.2013.817194\" aria-label=\"Article reference 5\" data-doi=\"10.1080\/00107514.2013.817194\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2013ConPh..54..143K\" aria-label=\"ADS reference 5\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BC3sXhsVKktb7O\" aria-label=\"CAS reference 5\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 5\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Terahertz%20waves%3A%20a%20tool%20for%20condensed%20matter%2C%20the%20life%20sciences%20and%20astronomy&amp;journal=Contemp.%20Phys.&amp;doi=10.1080%2F00107514.2013.817194&amp;volume=54&amp;pages=143-165&amp;publication_year=2013&amp;author=Kawano%2CY\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"6.\">\n<p class=\"c-article-references__text\" id=\"ref-CR6\">Fedorov, V. Y. &amp; Tzortzakis, S. Powerful terahertz waves from long-wavelength infrared laser filaments. Light Sci. Appl. <b>9<\/b>, 186 (2020).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/s41377-020-00423-3\" data-track-item_id=\"10.1038\/s41377-020-00423-3\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fs41377-020-00423-3\" aria-label=\"Article reference 6\" data-doi=\"10.1038\/s41377-020-00423-3\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2020LSA.....9..186F\" aria-label=\"ADS reference 6\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=33298833\" aria-label=\"PubMed reference 6\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed central reference\" data-track-action=\"pubmed central reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/pmc\/articles\/PMC7665013\" aria-label=\"PubMed Central reference 6\" target=\"_blank\">PubMed Central<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BB3cXitlCltLrN\" aria-label=\"CAS reference 6\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 6\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Powerful%20terahertz%20waves%20from%20long-wavelength%20infrared%20laser%20filaments&amp;journal=Light%20Sci.%20Appl.&amp;doi=10.1038%2Fs41377-020-00423-3&amp;volume=9&amp;publication_year=2020&amp;author=Fedorov%2CVY&amp;author=Tzortzakis%2CS\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"7.\">\n<p class=\"c-article-references__text\" id=\"ref-CR7\">Plusquellic, D. F., Siegrist, K., Heilweil, E. J. &amp; Esenturk, O. Applications of terahertz spectroscopy in biosystems. ChemPhysChem <b>8<\/b>, 2412\u20132431 (2007).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1002\/cphc.200700332\" data-track-item_id=\"10.1002\/cphc.200700332\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1002%2Fcphc.200700332\" aria-label=\"Article reference 7\" data-doi=\"10.1002\/cphc.200700332\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=17990257\" aria-label=\"PubMed reference 7\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BD2sXhsVCnurbO\" aria-label=\"CAS reference 7\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 7\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Applications%20of%20terahertz%20spectroscopy%20in%20biosystems&amp;journal=ChemPhysChem&amp;doi=10.1002%2Fcphc.200700332&amp;volume=8&amp;pages=2412-2431&amp;publication_year=2007&amp;author=Plusquellic%2CDF&amp;author=Siegrist%2CK&amp;author=Heilweil%2CEJ&amp;author=Esenturk%2CO\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"8.\">\n<p class=\"c-article-references__text\" id=\"ref-CR8\">Song, H.-J. &amp; Nagatsuma, T. Present and future of terahertz communications. IEEE Trans. Terahertz Sci. Technol. <b>1<\/b>, 256\u2013263 (2011).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1109\/TTHZ.2011.2159552\" data-track-item_id=\"10.1109\/TTHZ.2011.2159552\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1109%2FTTHZ.2011.2159552\" aria-label=\"Article reference 8\" data-doi=\"10.1109\/TTHZ.2011.2159552\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2011ITTST...1..256S\" aria-label=\"ADS reference 8\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 8\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Present%20and%20future%20of%20terahertz%20communications&amp;journal=IEEE%20Trans.%20Terahertz%20Sci.%20Technol.&amp;doi=10.1109%2FTTHZ.2011.2159552&amp;volume=1&amp;pages=256-263&amp;publication_year=2011&amp;author=Song%2CH-J&amp;author=Nagatsuma%2CT\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"9.\">\n<p class=\"c-article-references__text\" id=\"ref-CR9\">Yang, Y.-T., Callegari, C., Feng, X., Ekinci, K. L. &amp; Roukes, M. L. Zeptogram-scale nanomechanical mass sensing. Nano Lett. <b>6<\/b>, 583\u2013586 (2006).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1021\/nl052134m\" data-track-item_id=\"10.1021\/nl052134m\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1021%2Fnl052134m\" aria-label=\"Article reference 9\" data-doi=\"10.1021\/nl052134m\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2006NanoL...6..583Y\" aria-label=\"ADS reference 9\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=16608248\" aria-label=\"PubMed reference 9\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BD28Xit1OrsLg%3D\" aria-label=\"CAS reference 9\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 9\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Zeptogram-scale%20nanomechanical%20mass%20sensing&amp;journal=Nano%20Lett.&amp;doi=10.1021%2Fnl052134m&amp;volume=6&amp;pages=583-586&amp;publication_year=2006&amp;author=Yang%2CY-T&amp;author=Callegari%2CC&amp;author=Feng%2CX&amp;author=Ekinci%2CKL&amp;author=Roukes%2CML\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"10.\">\n<p class=\"c-article-references__text\" id=\"ref-CR10\">Chaste, J. et al. A nanomechanical mass sensor with yoctogram resolution. Nat. Nanotechnol. <b>7<\/b>, 301\u2013304 (2012).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/nnano.2012.42\" data-track-item_id=\"10.1038\/nnano.2012.42\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fnnano.2012.42\" aria-label=\"Article reference 10\" data-doi=\"10.1038\/nnano.2012.42\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2012NatNa...7..301C\" aria-label=\"ADS reference 10\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=22466856\" aria-label=\"PubMed reference 10\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BC38XkvVKitbc%3D\" aria-label=\"CAS reference 10\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 10\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=A%20nanomechanical%20mass%20sensor%20with%20yoctogram%20resolution&amp;journal=Nat.%20Nanotechnol.&amp;doi=10.1038%2Fnnano.2012.42&amp;volume=7&amp;pages=301-304&amp;publication_year=2012&amp;author=Chaste%2CJ\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"11.\">\n<p class=\"c-article-references__text\" id=\"ref-CR11\">Moser, J. et al. Ultrasensitive force detection with a nanotube mechanical resonator. Nat. Nanotechnol. <b>8<\/b>, 493\u2013496 (2013).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/nnano.2013.97\" data-track-item_id=\"10.1038\/nnano.2013.97\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fnnano.2013.97\" aria-label=\"Article reference 11\" data-doi=\"10.1038\/nnano.2013.97\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2013NatNa...8..493M\" aria-label=\"ADS reference 11\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=23748195\" aria-label=\"PubMed reference 11\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BC3sXptVagsrc%3D\" aria-label=\"CAS reference 11\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 11\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Ultrasensitive%20force%20detection%20with%20a%20nanotube%20mechanical%20resonator&amp;journal=Nat.%20Nanotechnol.&amp;doi=10.1038%2Fnnano.2013.97&amp;volume=8&amp;pages=493-496&amp;publication_year=2013&amp;author=Moser%2CJ\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"12.\">\n<p class=\"c-article-references__text\" id=\"ref-CR12\">Ricci, F., Cuairan, M. T., Conangla, G. P., Schell, A. W. &amp; Quidant, R. Accurate mass measurement of a levitated nanomechanical resonator for precision force-sensing. Nano Lett. <b>19<\/b>, 6711\u20136715 (2019).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1021\/acs.nanolett.9b00082\" data-track-item_id=\"10.1021\/acs.nanolett.9b00082\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1021%2Facs.nanolett.9b00082\" aria-label=\"Article reference 12\" data-doi=\"10.1021\/acs.nanolett.9b00082\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2019NanoL..19.6711R\" aria-label=\"ADS reference 12\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=30888180\" aria-label=\"PubMed reference 12\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BC1MXltFCjtLw%3D\" aria-label=\"CAS reference 12\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 12\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Accurate%20mass%20measurement%20of%20a%20levitated%20nanomechanical%20resonator%20for%20precision%20force-sensing&amp;journal=Nano%20Lett.&amp;doi=10.1021%2Facs.nanolett.9b00082&amp;volume=19&amp;pages=6711-6715&amp;publication_year=2019&amp;author=Ricci%2CF&amp;author=Cuairan%2CMT&amp;author=Conangla%2CGP&amp;author=Schell%2CAW&amp;author=Quidant%2CR\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"13.\">\n<p class=\"c-article-references__text\" id=\"ref-CR13\">Zhang, X., Myers, E., Sader, J. &amp; Roukes, M. Nanomechanical torsional resonators for frequency-shift infrared thermal sensing. Nano Lett. <b>13<\/b>, 1528\u20131534 (2013).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1021\/nl304687p\" data-track-item_id=\"10.1021\/nl304687p\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1021%2Fnl304687p\" aria-label=\"Article reference 13\" data-doi=\"10.1021\/nl304687p\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2013NanoL..13.1528Z\" aria-label=\"ADS reference 13\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=23458733\" aria-label=\"PubMed reference 13\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BC3sXjtlOrtbk%3D\" aria-label=\"CAS reference 13\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 13\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Nanomechanical%20torsional%20resonators%20for%20frequency-shift%20infrared%20thermal%20sensing&amp;journal=Nano%20Lett.&amp;doi=10.1021%2Fnl304687p&amp;volume=13&amp;pages=1528-1534&amp;publication_year=2013&amp;author=Zhang%2CX&amp;author=Myers%2CE&amp;author=Sader%2CJ&amp;author=Roukes%2CM\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"14.\">\n<p class=\"c-article-references__text\" id=\"ref-CR14\">Laurent, L., Yon, J.-J., Moulet, J.-S., Roukes, M. &amp; Duraffourg, L. 12-\u03bc m-pitch electromechanical resonator for thermal sensing. Phys. Rev. Appl. <b>9<\/b>, 024016 (2018).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1103\/PhysRevApplied.9.024016\" data-track-item_id=\"10.1103\/PhysRevApplied.9.024016\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1103%2FPhysRevApplied.9.024016\" aria-label=\"Article reference 14\" data-doi=\"10.1103\/PhysRevApplied.9.024016\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2018PhRvP...9b4016L\" aria-label=\"ADS reference 14\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BC1MXltVCmtbc%3D\" aria-label=\"CAS reference 14\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 14\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=12-%CE%BC%20m-pitch%20electromechanical%20resonator%20for%20thermal%20sensing&amp;journal=Phys.%20Rev.%20Appl.&amp;doi=10.1103%2FPhysRevApplied.9.024016&amp;volume=9&amp;publication_year=2018&amp;author=Laurent%2CL&amp;author=Yon%2CJ-J&amp;author=Moulet%2CJ-S&amp;author=Roukes%2CM&amp;author=Duraffourg%2CL\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"15.\">\n<p class=\"c-article-references__text\" id=\"ref-CR15\">Juv\u00e9, V. et al. Probing elasticity at the nanoscale: terahertz acoustic vibration of small metal nanoparticles. Nano Lett. <b>10<\/b>, 1853\u20131858 (2010).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1021\/nl100604r\" data-track-item_id=\"10.1021\/nl100604r\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1021%2Fnl100604r\" aria-label=\"Article reference 15\" data-doi=\"10.1021\/nl100604r\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2010NanoL..10.1853J\" aria-label=\"ADS reference 15\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=20411965\" aria-label=\"PubMed reference 15\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 15\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Probing%20elasticity%20at%20the%20nanoscale%3A%20terahertz%20acoustic%20vibration%20of%20small%20metal%20nanoparticles&amp;journal=Nano%20Lett.&amp;doi=10.1021%2Fnl100604r&amp;volume=10&amp;pages=1853-1858&amp;publication_year=2010&amp;author=Juv%C3%A9%2CV\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"16.\">\n<p class=\"c-article-references__text\" id=\"ref-CR16\">Rozas, G. et al. Lifetime of THz acoustic nanocavity modes. Phys. Rev. Lett. <b>102<\/b>, 015502 (2009).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1103\/PhysRevLett.102.015502\" data-track-item_id=\"10.1103\/PhysRevLett.102.015502\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1103%2FPhysRevLett.102.015502\" aria-label=\"Article reference 16\" data-doi=\"10.1103\/PhysRevLett.102.015502\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2009PhRvL.102a5502R\" aria-label=\"ADS reference 16\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=19257206\" aria-label=\"PubMed reference 16\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:STN:280:DC%2BD1M7ot1Olsw%3D%3D\" aria-label=\"CAS reference 16\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 16\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Lifetime%20of%20THz%20acoustic%20nanocavity%20modes&amp;journal=Phys.%20Rev.%20Lett.&amp;doi=10.1103%2FPhysRevLett.102.015502&amp;volume=102&amp;publication_year=2009&amp;author=Rozas%2CG\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"17.\">\n<p class=\"c-article-references__text\" id=\"ref-CR17\">Rips, S. &amp; Hartmann, M. J. Quantum information processing with nanomechanical qubits. Phys. Rev. Lett. <b>110<\/b>, 120503 (2013).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1103\/PhysRevLett.110.120503\" data-track-item_id=\"10.1103\/PhysRevLett.110.120503\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1103%2FPhysRevLett.110.120503\" aria-label=\"Article reference 17\" data-doi=\"10.1103\/PhysRevLett.110.120503\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2013PhRvL.110l0503R\" aria-label=\"ADS reference 17\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=25166784\" aria-label=\"PubMed reference 17\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 17\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Quantum%20information%20processing%20with%20nanomechanical%20qubits&amp;journal=Phys.%20Rev.%20Lett.&amp;doi=10.1103%2FPhysRevLett.110.120503&amp;volume=110&amp;publication_year=2013&amp;author=Rips%2CS&amp;author=Hartmann%2CMJ\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"18.\">\n<p class=\"c-article-references__text\" id=\"ref-CR18\">Stannigel, K. et al. Optomechanical quantum information processing with photons and phonons. Phys. Rev. Lett. <b>109<\/b>, 013603 (2012).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1103\/PhysRevLett.109.013603\" data-track-item_id=\"10.1103\/PhysRevLett.109.013603\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1103%2FPhysRevLett.109.013603\" aria-label=\"Article reference 18\" data-doi=\"10.1103\/PhysRevLett.109.013603\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2012PhRvL.109a3603S\" aria-label=\"ADS reference 18\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=23031105\" aria-label=\"PubMed reference 18\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:STN:280:DC%2BC3s%2FitVajtg%3D%3D\" aria-label=\"CAS reference 18\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 18\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Optomechanical%20quantum%20information%20processing%20with%20photons%20and%20phonons&amp;journal=Phys.%20Rev.%20Lett.&amp;doi=10.1103%2FPhysRevLett.109.013603&amp;volume=109&amp;publication_year=2012&amp;author=Stannigel%2CK\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"19.\">\n<p class=\"c-article-references__text\" id=\"ref-CR19\">Wollack, E. A. et al. Quantum state preparation and tomography of entangled mechanical resonators. Nature <b>604<\/b>, 463\u2013467 (2022).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/s41586-022-04500-y\" data-track-item_id=\"10.1038\/s41586-022-04500-y\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fs41586-022-04500-y\" aria-label=\"Article reference 19\" data-doi=\"10.1038\/s41586-022-04500-y\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2022Natur.604..463W\" aria-label=\"ADS reference 19\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=35444325\" aria-label=\"PubMed reference 19\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BB38XhtVGrsbjL\" aria-label=\"CAS reference 19\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 19\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Quantum%20state%20preparation%20and%20tomography%20of%20entangled%20mechanical%20resonators&amp;journal=Nature&amp;doi=10.1038%2Fs41586-022-04500-y&amp;volume=604&amp;pages=463-467&amp;publication_year=2022&amp;author=Wollack%2CEA\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"20.\">\n<p class=\"c-article-references__text\" id=\"ref-CR20\">Arndt, M. &amp; Hornberger, K. Testing the limits of quantum mechanical superpositions. Nat. Phys. <b>10<\/b>, 271\u2013277 (2014).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/nphys2863\" data-track-item_id=\"10.1038\/nphys2863\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fnphys2863\" aria-label=\"Article reference 20\" data-doi=\"10.1038\/nphys2863\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BC2cXltlersrs%3D\" aria-label=\"CAS reference 20\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 20\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Testing%20the%20limits%20of%20quantum%20mechanical%20superpositions&amp;journal=Nat.%20Phys.&amp;doi=10.1038%2Fnphys2863&amp;volume=10&amp;pages=271-277&amp;publication_year=2014&amp;author=Arndt%2CM&amp;author=Hornberger%2CK\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"21.\">\n<p class=\"c-article-references__text\" id=\"ref-CR21\">Forstner, S., Zych, M., Basiri-Esfahani, S., Khosla, K. E. &amp; Bowen, W. P. Nanomechanical test of quantum linearity. Optica <b>7<\/b>, 1427\u20131434 (2020).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1364\/OPTICA.391671\" data-track-item_id=\"10.1364\/OPTICA.391671\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1364%2FOPTICA.391671\" aria-label=\"Article reference 21\" data-doi=\"10.1364\/OPTICA.391671\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2020Optic...7.1427F\" aria-label=\"ADS reference 21\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 21\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Nanomechanical%20test%20of%20quantum%20linearity&amp;journal=Optica&amp;doi=10.1364%2FOPTICA.391671&amp;volume=7&amp;pages=1427-1434&amp;publication_year=2020&amp;author=Forstner%2CS&amp;author=Zych%2CM&amp;author=Basiri-Esfahani%2CS&amp;author=Khosla%2CKE&amp;author=Bowen%2CWP\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"22.\">\n<p class=\"c-article-references__text\" id=\"ref-CR22\">Clerk, A., Lehnert, K., Bertet, P., Petta, J. &amp; Nakamura, Y. Hybrid quantum systems with circuit quantum electrodynamics. Nat. Phys. <b>16<\/b>, 257\u2013267 (2020).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/s41567-020-0797-9\" data-track-item_id=\"10.1038\/s41567-020-0797-9\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fs41567-020-0797-9\" aria-label=\"Article reference 22\" data-doi=\"10.1038\/s41567-020-0797-9\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BB3cXktFelsbw%3D\" aria-label=\"CAS reference 22\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 22\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Hybrid%20quantum%20systems%20with%20circuit%20quantum%20electrodynamics&amp;journal=Nat.%20Phys.&amp;doi=10.1038%2Fs41567-020-0797-9&amp;volume=16&amp;pages=257-267&amp;publication_year=2020&amp;author=Clerk%2CA&amp;author=Lehnert%2CK&amp;author=Bertet%2CP&amp;author=Petta%2CJ&amp;author=Nakamura%2CY\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"23.\">\n<p class=\"c-article-references__text\" id=\"ref-CR23\">Han, X., Fu, W., Zou, C.-L., Jiang, L. &amp; Tang, H. X. Microwave-optical quantum frequency conversion. Optica <b>8<\/b>, 1050\u20131064 (2021).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1364\/OPTICA.425414\" data-track-item_id=\"10.1364\/OPTICA.425414\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1364%2FOPTICA.425414\" aria-label=\"Article reference 23\" data-doi=\"10.1364\/OPTICA.425414\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2021Optic...8.1050H\" aria-label=\"ADS reference 23\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 23\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Microwave-optical%20quantum%20frequency%20conversion&amp;journal=Optica&amp;doi=10.1364%2FOPTICA.425414&amp;volume=8&amp;pages=1050-1064&amp;publication_year=2021&amp;author=Han%2CX&amp;author=Fu%2CW&amp;author=Zou%2CC-L&amp;author=Jiang%2CL&amp;author=Tang%2CHX\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"24.\">\n<p class=\"c-article-references__text\" id=\"ref-CR24\">Velez, S. T. et al. Preparation and decay of a single quantum of vibration at ambient conditions. Phys. Rev. X <b>9<\/b>, 041007 (2019).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BB3cXjvFCjsLo%3D\" aria-label=\"CAS reference 24\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 24\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Preparation%20and%20decay%20of%20a%20single%20quantum%20of%20vibration%20at%20ambient%20conditions&amp;journal=Phys.%20Rev.%20X&amp;volume=9&amp;publication_year=2019&amp;author=Velez%2CST\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"25.\">\n<p class=\"c-article-references__text\" id=\"ref-CR25\">Schliesser, A., Rivi\u00e8re, R., Anetsberger, G., Arcizet, O. &amp; Kippenberg, T. J. Resolved-sideband cooling of a micromechanical oscillator. Nat. Phys. <b>4<\/b>, 415\u2013419 (2008).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/nphys939\" data-track-item_id=\"10.1038\/nphys939\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fnphys939\" aria-label=\"Article reference 25\" data-doi=\"10.1038\/nphys939\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BD1cXltl2iu7c%3D\" aria-label=\"CAS reference 25\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 25\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Resolved-sideband%20cooling%20of%20a%20micromechanical%20oscillator&amp;journal=Nat.%20Phys.&amp;doi=10.1038%2Fnphys939&amp;volume=4&amp;pages=415-419&amp;publication_year=2008&amp;author=Schliesser%2CA&amp;author=Rivi%C3%A8re%2CR&amp;author=Anetsberger%2CG&amp;author=Arcizet%2CO&amp;author=Kippenberg%2CTJ\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"26.\">\n<p class=\"c-article-references__text\" id=\"ref-CR26\">Xie, J. et al. Sub-terahertz electromechanics. Nat. Electron. 1\u20136 (2023).<\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"27.\">\n<p class=\"c-article-references__text\" id=\"ref-CR27\">Xie, J., Shen, M. &amp; Tang, H. X. High acoustic velocity x-cut lithium niobate sub-terahertz electromechanics. Appl. Phys. Lett. <b>124<\/b>, (2024).<\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"28.\">\n<p class=\"c-article-references__text\" id=\"ref-CR28\">Xie, J., Shen, M. &amp; Tang, H. X. Sub-terahertz optomechanics. Optica <b>11<\/b>, 724\u2013725 (2024).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1364\/OPTICA.524431\" data-track-item_id=\"10.1364\/OPTICA.524431\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1364%2FOPTICA.524431\" aria-label=\"Article reference 28\" data-doi=\"10.1364\/OPTICA.524431\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2024Optic..11..724X\" aria-label=\"ADS reference 28\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BB2cXit1WgurjK\" aria-label=\"CAS reference 28\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 28\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Sub-terahertz%20optomechanics&amp;journal=Optica&amp;doi=10.1364%2FOPTICA.524431&amp;volume=11&amp;pages=724-725&amp;publication_year=2024&amp;author=Xie%2CJ&amp;author=Shen%2CM&amp;author=Tang%2CHX\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"29.\">\n<p class=\"c-article-references__text\" id=\"ref-CR29\">Kramer, J. et al. Acoustic resonators above 100 GHz. Appl. Phys. Lett. <b>127<\/b>, 012204 (2025).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1063\/5.0275691\" data-track-item_id=\"10.1063\/5.0275691\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1063%2F5.0275691\" aria-label=\"Article reference 29\" data-doi=\"10.1063\/5.0275691\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2025ApPhL.127a2204K\" aria-label=\"ADS reference 29\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BB2MXhs1agu7bJ\" aria-label=\"CAS reference 29\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 29\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Acoustic%20resonators%20above%20100%20GHz&amp;journal=Appl.%20Phys.%20Lett.&amp;doi=10.1063%2F5.0275691&amp;volume=127&amp;publication_year=2025&amp;author=Kramer%2CJ\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"30.\">\n<p class=\"c-article-references__text\" id=\"ref-CR30\">Wang, D., Xie, J., Guo, Y., Shen, M. &amp; Tang, H. X. Noncontact excitation of multi-GHz lithium niobate electromechanical resonators. Microsyst. Nanoeng. <b>10<\/b>, 124 (2024).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/s41378-024-00771-9\" data-track-item_id=\"10.1038\/s41378-024-00771-9\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fs41378-024-00771-9\" aria-label=\"Article reference 30\" data-doi=\"10.1038\/s41378-024-00771-9\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2024MicNa..10..124W\" aria-label=\"ADS reference 30\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=39237536\" aria-label=\"PubMed reference 30\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed central reference\" data-track-action=\"pubmed central reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/pmc\/articles\/PMC11377770\" aria-label=\"PubMed Central reference 30\" target=\"_blank\">PubMed Central<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 30\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Noncontact%20excitation%20of%20multi-GHz%20lithium%20niobate%20electromechanical%20resonators&amp;journal=Microsyst.%20Nanoeng.&amp;doi=10.1038%2Fs41378-024-00771-9&amp;volume=10&amp;publication_year=2024&amp;author=Wang%2CD&amp;author=Xie%2CJ&amp;author=Guo%2CY&amp;author=Shen%2CM&amp;author=Tang%2CHX\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"31.\">\n<p class=\"c-article-references__text\" id=\"ref-CR31\">Gruenke-Freudenstein, R. G. et al. Surface and bulk two-level-system losses in lithium niobate acoustic resonators. Phys. Rev. Appl. <b>23<\/b>, 064055 (2025).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1103\/tgs3-kkw8\" data-track-item_id=\"10.1103\/tgs3-kkw8\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1103%2Ftgs3-kkw8\" aria-label=\"Article reference 31\" data-doi=\"10.1103\/tgs3-kkw8\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2025PhRvP..23f4055G\" aria-label=\"ADS reference 31\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 31\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Surface%20and%20bulk%20two-level-system%20losses%20in%20lithium%20niobate%20acoustic%20resonators&amp;journal=Phys.%20Rev.%20Appl.&amp;doi=10.1103%2Ftgs3-kkw8&amp;volume=23&amp;publication_year=2025&amp;author=Gruenke-Freudenstein%2CRG\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"32.\">\n<p class=\"c-article-references__text\" id=\"ref-CR32\">Soyer, C., Cattan, E. &amp; Remiens, D. Electrical damage induced by reactive ion-beam etching of lead-zirconate-titanate thin films. J. Appl. Phys. <b>97<\/b>, (2005).<\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"33.\">\n<p class=\"c-article-references__text\" id=\"ref-CR33\">Verbridge, S. S., Parpia, J. M., Reichenbach, R. B., Bellan, L. M. &amp; Craighead, H. G. High-quality factor resonance at room temperature with nanostrings under high tensile stress. J. Appl. Phys. <b>99<\/b>, (2006).<\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"34.\">\n<p class=\"c-article-references__text\" id=\"ref-CR34\">Chen, F. Photonic guiding structures in lithium niobate crystals produced by energetic ion beams. J. Appl. Phys. <b>106<\/b>, (2009).<\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"35.\">\n<p class=\"c-article-references__text\" id=\"ref-CR35\">Wang, J. et al. Process-induced poling and plasma-induced damage of thin film PZT. Microelectron. Eng. <b>177<\/b>, 13\u201318 (2017).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1016\/j.mee.2017.01.016\" data-track-item_id=\"10.1016\/j.mee.2017.01.016\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1016%2Fj.mee.2017.01.016\" aria-label=\"Article reference 35\" data-doi=\"10.1016\/j.mee.2017.01.016\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BC2sXjslWhurk%3D\" aria-label=\"CAS reference 35\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 35\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Process-induced%20poling%20and%20plasma-induced%20damage%20of%20thin%20film%20PZT&amp;journal=Microelectron.%20Eng.&amp;doi=10.1016%2Fj.mee.2017.01.016&amp;volume=177&amp;pages=13-18&amp;publication_year=2017&amp;author=Wang%2CJ\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"36.\">\n<p class=\"c-article-references__text\" id=\"ref-CR36\">Rodriguez, J. et al. Direct detection of Akhiezer damping in a silicon MEMS resonator. Sci. Rep. <b>9<\/b>, 2244 (2019).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/s41598-019-38847-6\" data-track-item_id=\"10.1038\/s41598-019-38847-6\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fs41598-019-38847-6\" aria-label=\"Article reference 36\" data-doi=\"10.1038\/s41598-019-38847-6\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=30783192\" aria-label=\"PubMed reference 36\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed central reference\" data-track-action=\"pubmed central reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/pmc\/articles\/PMC6381092\" aria-label=\"PubMed Central reference 36\" target=\"_blank\">PubMed Central<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 36\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Direct%20detection%20of%20Akhiezer%20damping%20in%20a%20silicon%20MEMS%20resonator&amp;journal=Sci.%20Rep.&amp;doi=10.1038%2Fs41598-019-38847-6&amp;volume=9&amp;publication_year=2019&amp;author=Rodriguez%2CJ\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"37.\">\n<p class=\"c-article-references__text\" id=\"ref-CR37\">Wu, C.-C. et al. Thinning technology for lithium niobate wafer by surface activated bonding and chemical mechanical polishing. Jpn. J. Appl. Phys. <b>45<\/b>, 3822 (2006).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1143\/JJAP.45.3822\" data-track-item_id=\"10.1143\/JJAP.45.3822\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1143%2FJJAP.45.3822\" aria-label=\"Article reference 37\" data-doi=\"10.1143\/JJAP.45.3822\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2006JaJAP..45.3822W\" aria-label=\"ADS reference 37\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BD28Xkslartr0%3D\" aria-label=\"CAS reference 37\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 37\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Thinning%20technology%20for%20lithium%20niobate%20wafer%20by%20surface%20activated%20bonding%20and%20chemical%20mechanical%20polishing&amp;journal=Jpn.%20J.%20Appl.%20Phys.&amp;doi=10.1143%2FJJAP.45.3822&amp;volume=45&amp;publication_year=2006&amp;author=Wu%2CC-C\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"38.\">\n<p class=\"c-article-references__text\" id=\"ref-CR38\">Zhong, Z.-W. Recent developments and applications of chemical mechanical polishing. Int. J. Adv. Manuf. Technol. <b>109<\/b>, 1419\u20131430 (2020).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"noopener\" data-track-label=\"10.1007\/s00170-020-05740-w\" data-track-item_id=\"10.1007\/s00170-020-05740-w\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/link.springer.com\/doi\/10.1007\/s00170-020-05740-w\" aria-label=\"Article reference 38\" data-doi=\"10.1007\/s00170-020-05740-w\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 38\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Recent%20developments%20and%20applications%20of%20chemical%20mechanical%20polishing&amp;journal=Int.%20J.%20Adv.%20Manuf.%20Technol.&amp;doi=10.1007%2Fs00170-020-05740-w&amp;volume=109&amp;pages=1419-1430&amp;publication_year=2020&amp;author=Zhong%2CZ-W\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"39.\">\n<p class=\"c-article-references__text\" id=\"ref-CR39\">Zhang, Y. et al. Investigation of the defect density in ultra-thin Al2O3 films grown using atomic layer deposition. Surf. Coat. Technol. <b>205<\/b>, 3334\u20133339 (2011).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1016\/j.surfcoat.2010.12.001\" data-track-item_id=\"10.1016\/j.surfcoat.2010.12.001\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1016%2Fj.surfcoat.2010.12.001\" aria-label=\"Article reference 39\" data-doi=\"10.1016\/j.surfcoat.2010.12.001\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BC3MXjsVCntg%3D%3D\" aria-label=\"CAS reference 39\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 39\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Investigation%20of%20the%20defect%20density%20in%20ultra-thin%20Al2O3%20films%20grown%20using%20atomic%20layer%20deposition&amp;journal=Surf.%20Coat.%20Technol.&amp;doi=10.1016%2Fj.surfcoat.2010.12.001&amp;volume=205&amp;pages=3334-3339&amp;publication_year=2011&amp;author=Zhang%2CY\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"40.\">\n<p class=\"c-article-references__text\" id=\"ref-CR40\">\u00d8streng, E., S\u00f8nsteby, H. H., Sajavaara, T., Nilsen, O. &amp; Fjellv\u00e5g, H. Atomic layer deposition of ferroelectric LiNbO3. J. Mater. Chem. C <b>1<\/b>, 4283\u20134290 (2013).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1039\/C3TC30271G\" data-track-item_id=\"10.1039\/C3TC30271G\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1039%2FC3TC30271G\" aria-label=\"Article reference 40\" data-doi=\"10.1039\/C3TC30271G\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 40\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Atomic%20layer%20deposition%20of%20ferroelectric%20LiNbO3&amp;journal=J.%20Mater.%20Chem.%20C&amp;doi=10.1039%2FC3TC30271G&amp;volume=1&amp;pages=4283-4290&amp;publication_year=2013&amp;author=%C3%98streng%2CE&amp;author=S%C3%B8nsteby%2CHH&amp;author=Sajavaara%2CT&amp;author=Nilsen%2CO&amp;author=Fjellv%C3%A5g%2CH\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"41.\">\n<p class=\"c-article-references__text\" id=\"ref-CR41\">Cleland, A. N. &amp; Roukes, M. L. Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals. Appl. Phys. Lett. <b>69<\/b>, 2653\u20132655 (1996).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1063\/1.117548\" data-track-item_id=\"10.1063\/1.117548\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1063%2F1.117548\" aria-label=\"Article reference 41\" data-doi=\"10.1063\/1.117548\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=1996ApPhL..69.2653C\" aria-label=\"ADS reference 41\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DyaK28XmsV2rtL8%3D\" aria-label=\"CAS reference 41\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 41\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Fabrication%20of%20high%20frequency%20nanometer%20scale%20mechanical%20resonators%20from%20bulk%20Si%20crystals&amp;journal=Appl.%20Phys.%20Lett.&amp;doi=10.1063%2F1.117548&amp;volume=69&amp;pages=2653-2655&amp;publication_year=1996&amp;author=Cleland%2CAN&amp;author=Roukes%2CML\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"42.\">\n<p class=\"c-article-references__text\" id=\"ref-CR42\">Carr, D. W., Evoy, S., Sekaric, L., Craighead, H. G. &amp; Parpia, J. M. Measurement of mechanical resonance and losses in nanometer scale silicon wires. Appl. Phys. Lett. <b>75<\/b>, 920\u2013922 (1999).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1063\/1.124554\" data-track-item_id=\"10.1063\/1.124554\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1063%2F1.124554\" aria-label=\"Article reference 42\" data-doi=\"10.1063\/1.124554\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=1999ApPhL..75..920C\" aria-label=\"ADS reference 42\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DyaK1MXkvFGmsbg%3D\" aria-label=\"CAS reference 42\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 42\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Measurement%20of%20mechanical%20resonance%20and%20losses%20in%20nanometer%20scale%20silicon%20wires&amp;journal=Appl.%20Phys.%20Lett.&amp;doi=10.1063%2F1.124554&amp;volume=75&amp;pages=920-922&amp;publication_year=1999&amp;author=Carr%2CDW&amp;author=Evoy%2CS&amp;author=Sekaric%2CL&amp;author=Craighead%2CHG&amp;author=Parpia%2CJM\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"43.\">\n<p class=\"c-article-references__text\" id=\"ref-CR43\">Cleland, A., Pophristic, M. &amp; Ferguson, I. Single-crystal aluminum nitride nanomechanical resonators. Appl. Phys. Lett. <b>79<\/b>, 2070\u20132072 (2001).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1063\/1.1396633\" data-track-item_id=\"10.1063\/1.1396633\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1063%2F1.1396633\" aria-label=\"Article reference 43\" data-doi=\"10.1063\/1.1396633\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2001ApPhL..79.2070C\" aria-label=\"ADS reference 43\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BD3MXntVWhsrY%3D\" aria-label=\"CAS reference 43\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 43\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Single-crystal%20aluminum%20nitride%20nanomechanical%20resonators&amp;journal=Appl.%20Phys.%20Lett.&amp;doi=10.1063%2F1.1396633&amp;volume=79&amp;pages=2070-2072&amp;publication_year=2001&amp;author=Cleland%2CA&amp;author=Pophristic%2CM&amp;author=Ferguson%2CI\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"44.\">\n<p class=\"c-article-references__text\" id=\"ref-CR44\">Sekaric, L., Carr, D., Evoy, S., Parpia, J. &amp; Craighead, H. G. Nanomechanical resonant structures in silicon nitride: fabrication, operation and dissipation issues. Sens. Actuators A Phys. <b>101<\/b>, 215\u2013219 (2002).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1016\/S0924-4247(02)00149-8\" data-track-item_id=\"10.1016\/S0924-4247(02)00149-8\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1016%2FS0924-4247%2802%2900149-8\" aria-label=\"Article reference 44\" data-doi=\"10.1016\/S0924-4247(02)00149-8\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2002SeAcA.101..215S\" aria-label=\"ADS reference 44\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BD38XmvVOmtL0%3D\" aria-label=\"CAS reference 44\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 44\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Nanomechanical%20resonant%20structures%20in%20silicon%20nitride%3A%20fabrication%2C%20operation%20and%20dissipation%20issues&amp;journal=Sens.%20Actuators%20A%20Phys.&amp;doi=10.1016%2FS0924-4247%2802%2900149-8&amp;volume=101&amp;pages=215-219&amp;publication_year=2002&amp;author=Sekaric%2CL&amp;author=Carr%2CD&amp;author=Evoy%2CS&amp;author=Parpia%2CJ&amp;author=Craighead%2CHG\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"45.\">\n<p class=\"c-article-references__text\" id=\"ref-CR45\">Sekaric, L. et al. Nanomechanical resonant structures in nanocrystalline diamond. Appl. Phys. Lett. <b>81<\/b>, 4455\u20134457 (2002).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1063\/1.1526941\" data-track-item_id=\"10.1063\/1.1526941\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1063%2F1.1526941\" aria-label=\"Article reference 45\" data-doi=\"10.1063\/1.1526941\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2002ApPhL..81.4455S\" aria-label=\"ADS reference 45\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BD38XptFGiu7k%3D\" aria-label=\"CAS reference 45\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 45\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Nanomechanical%20resonant%20structures%20in%20nanocrystalline%20diamond&amp;journal=Appl.%20Phys.%20Lett.&amp;doi=10.1063%2F1.1526941&amp;volume=81&amp;pages=4455-4457&amp;publication_year=2002&amp;author=Sekaric%2CL\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"46.\">\n<p class=\"c-article-references__text\" id=\"ref-CR46\">Henry Huang, X. M., Zorman, C. A., Mehregany, M. &amp; Roukes, M. L. Nanodevice motion at microwave frequencies. Nature <b>421<\/b>, 496\u2013496 (2003).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/421496a\" data-track-item_id=\"10.1038\/421496a\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2F421496a\" aria-label=\"Article reference 46\" data-doi=\"10.1038\/421496a\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2003Natur.421..496H\" aria-label=\"ADS reference 46\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=12556880\" aria-label=\"PubMed reference 46\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 46\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Nanodevice%20motion%20at%20microwave%20frequencies&amp;journal=Nature&amp;doi=10.1038%2F421496a&amp;volume=421&amp;pages=496-496&amp;publication_year=2003&amp;author=Henry%20Huang%2CXM&amp;author=Zorman%2CCA&amp;author=Mehregany%2CM&amp;author=Roukes%2CML\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"47.\">\n<p class=\"c-article-references__text\" id=\"ref-CR47\">Ruby, R., Bradley, P., Larson, J. &amp; Oshmyansky, Y. PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs). Electron. Lett. <b>35<\/b>, 794\u2013795 (1999).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1049\/el:19990559\" data-track-item_id=\"10.1049\/el:19990559\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1049%2Fel%3A19990559\" aria-label=\"Article reference 47\" data-doi=\"10.1049\/el:19990559\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=1999ElL....35..794R\" aria-label=\"ADS reference 47\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 47\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=PCS%201900%20MHz%20duplexer%20using%20thin%20film%20bulk%20acoustic%20resonators%20%28FBARs%29&amp;journal=Electron.%20Lett.&amp;doi=10.1049%2Fel%3A19990559&amp;volume=35&amp;pages=794-795&amp;publication_year=1999&amp;author=Ruby%2CR&amp;author=Bradley%2CP&amp;author=Larson%2CJ&amp;author=Oshmyansky%2CY\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"48.\">\n<p class=\"c-article-references__text\" id=\"ref-CR48\">Gabl, R. et al. First results on label-free detection of DNA and protein molecules using a novel integrated sensor technology based on gravimetric detection principles. Biosens. Bioelectron. <b>19<\/b>, 615\u2013620 (2004).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1016\/S0956-5663(03)00259-8\" data-track-item_id=\"10.1016\/S0956-5663(03)00259-8\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1016%2FS0956-5663%2803%2900259-8\" aria-label=\"Article reference 48\" data-doi=\"10.1016\/S0956-5663(03)00259-8\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=14683645\" aria-label=\"PubMed reference 48\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BD3sXpvVWrs70%3D\" aria-label=\"CAS reference 48\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 48\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=First%20results%20on%20label-free%20detection%20of%20DNA%20and%20protein%20molecules%20using%20a%20novel%20integrated%20sensor%20technology%20based%20on%20gravimetric%20detection%20principles&amp;journal=Biosens.%20Bioelectron.&amp;doi=10.1016%2FS0956-5663%2803%2900259-8&amp;volume=19&amp;pages=615-620&amp;publication_year=2004&amp;author=Gabl%2CR\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"49.\">\n<p class=\"c-article-references__text\" id=\"ref-CR49\">O\u2019Connell, A. D. et al. Quantum ground state and single-phonon control of a mechanical resonator. Nature <b>464<\/b>, 697\u2013703 (2010).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/nature08967\" data-track-item_id=\"10.1038\/nature08967\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fnature08967\" aria-label=\"Article reference 49\" data-doi=\"10.1038\/nature08967\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2010Natur.464..697O\" aria-label=\"ADS reference 49\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=20237473\" aria-label=\"PubMed reference 49\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 49\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Quantum%20ground%20state%20and%20single-phonon%20control%20of%20a%20mechanical%20resonator&amp;journal=Nature&amp;doi=10.1038%2Fnature08967&amp;volume=464&amp;pages=697-703&amp;publication_year=2010&amp;author=O%E2%80%99Connell%2CAD\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"50.\">\n<p class=\"c-article-references__text\" id=\"ref-CR50\">Kim, E., Choi, Y.-K., Song, J. &amp; Lee, J. Detection of various self-assembled monolayers by AlN-based film bulk acoustic resonator. Mater. Res. Bull. <b>48<\/b>, 5076\u20135079 (2013).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1016\/j.materresbull.2013.05.096\" data-track-item_id=\"10.1016\/j.materresbull.2013.05.096\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1016%2Fj.materresbull.2013.05.096\" aria-label=\"Article reference 50\" data-doi=\"10.1016\/j.materresbull.2013.05.096\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BC3sXhtVyisr3I\" aria-label=\"CAS reference 50\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 50\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Detection%20of%20various%20self-assembled%20monolayers%20by%20AlN-based%20film%20bulk%20acoustic%20resonator&amp;journal=Mater.%20Res.%20Bull.&amp;doi=10.1016%2Fj.materresbull.2013.05.096&amp;volume=48&amp;pages=5076-5079&amp;publication_year=2013&amp;author=Kim%2CE&amp;author=Choi%2CY-K&amp;author=Song%2CJ&amp;author=Lee%2CJ\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"51.\">\n<p class=\"c-article-references__text\" id=\"ref-CR51\">Manenti, R. et al. Surface acoustic wave resonators in the quantum regime. Phys. Rev. B <b>93<\/b>, 041411 (2016).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1103\/PhysRevB.93.041411\" data-track-item_id=\"10.1103\/PhysRevB.93.041411\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1103%2FPhysRevB.93.041411\" aria-label=\"Article reference 51\" data-doi=\"10.1103\/PhysRevB.93.041411\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2016PhRvB..93d1411M\" aria-label=\"ADS reference 51\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 51\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Surface%20acoustic%20wave%20resonators%20in%20the%20quantum%20regime&amp;journal=Phys.%20Rev.%20B&amp;doi=10.1103%2FPhysRevB.93.041411&amp;volume=93&amp;publication_year=2016&amp;author=Manenti%2CR\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"52.\">\n<p class=\"c-article-references__text\" id=\"ref-CR52\">Fu, S. et al. High-frequency surface acoustic wave devices based on ZnO\/SiC layered structure. IEEE Electron Device Lett. <b>40<\/b>, 103\u2013106 (2018).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1109\/LED.2018.2881467\" data-track-item_id=\"10.1109\/LED.2018.2881467\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1109%2FLED.2018.2881467\" aria-label=\"Article reference 52\" data-doi=\"10.1109\/LED.2018.2881467\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2019IEDL...40..103F\" aria-label=\"ADS reference 52\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 52\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=High-frequency%20surface%20acoustic%20wave%20devices%20based%20on%20ZnO%2FSiC%20layered%20structure&amp;journal=IEEE%20Electron%20Device%20Lett.&amp;doi=10.1109%2FLED.2018.2881467&amp;volume=40&amp;pages=103-106&amp;publication_year=2018&amp;author=Fu%2CS\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"53.\">\n<p class=\"c-article-references__text\" id=\"ref-CR53\">Shao, L. et al. Phononic band structure engineering for high-Q gigahertz surface acoustic wave resonators on lithium niobate. Phys. Rev. Appl. <b>12<\/b>, 014022 (2019).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1103\/PhysRevApplied.12.014022\" data-track-item_id=\"10.1103\/PhysRevApplied.12.014022\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1103%2FPhysRevApplied.12.014022\" aria-label=\"Article reference 53\" data-doi=\"10.1103\/PhysRevApplied.12.014022\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2019PhRvP..12a4022S\" aria-label=\"ADS reference 53\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BC1MXhvFanu7jK\" aria-label=\"CAS reference 53\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 53\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Phononic%20band%20structure%20engineering%20for%20high-Q%20gigahertz%20surface%20acoustic%20wave%20resonators%20on%20lithium%20niobate&amp;journal=Phys.%20Rev.%20Appl.&amp;doi=10.1103%2FPhysRevApplied.12.014022&amp;volume=12&amp;publication_year=2019&amp;author=Shao%2CL\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"54.\">\n<p class=\"c-article-references__text\" id=\"ref-CR54\">Mayor, F. M. et al. Gigahertz phononic integrated circuits on thin-film lithium niobate on sapphire. Phys. Rev. Appl. <b>15<\/b>, 014039 (2021).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1103\/PhysRevApplied.15.014039\" data-track-item_id=\"10.1103\/PhysRevApplied.15.014039\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1103%2FPhysRevApplied.15.014039\" aria-label=\"Article reference 54\" data-doi=\"10.1103\/PhysRevApplied.15.014039\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2021PhRvP..15a4039M\" aria-label=\"ADS reference 54\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BB3MXkt1Gku7c%3D\" aria-label=\"CAS reference 54\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 54\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Gigahertz%20phononic%20integrated%20circuits%20on%20thin-film%20lithium%20niobate%20on%20sapphire&amp;journal=Phys.%20Rev.%20Appl.&amp;doi=10.1103%2FPhysRevApplied.15.014039&amp;volume=15&amp;publication_year=2021&amp;author=Mayor%2CFM\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"55.\">\n<p class=\"c-article-references__text\" id=\"ref-CR55\">Shao, L. et al. Electrical control of surface acoustic waves. Nat. Electron. <b>5<\/b>, 348\u2013355 (2022).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/s41928-022-00773-3\" data-track-item_id=\"10.1038\/s41928-022-00773-3\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fs41928-022-00773-3\" aria-label=\"Article reference 55\" data-doi=\"10.1038\/s41928-022-00773-3\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 55\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Electrical%20control%20of%20surface%20acoustic%20waves&amp;journal=Nat.%20Electron.&amp;doi=10.1038%2Fs41928-022-00773-3&amp;volume=5&amp;pages=348-355&amp;publication_year=2022&amp;author=Shao%2CL\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"56.\">\n<p class=\"c-article-references__text\" id=\"ref-CR56\">Eichenfield, M., Chan, J., Camacho, R. M., Vahala, K. J. &amp; Painter, O. Optomechanical crystals. Nature <b>462<\/b>, 78\u201382 (2009).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/nature08524\" data-track-item_id=\"10.1038\/nature08524\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fnature08524\" aria-label=\"Article reference 56\" data-doi=\"10.1038\/nature08524\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2009Natur.462...78E\" aria-label=\"ADS reference 56\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=19838165\" aria-label=\"PubMed reference 56\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BD1MXht1OgsrvM\" aria-label=\"CAS reference 56\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 56\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Optomechanical%20crystals&amp;journal=Nature&amp;doi=10.1038%2Fnature08524&amp;volume=462&amp;pages=78-82&amp;publication_year=2009&amp;author=Eichenfield%2CM&amp;author=Chan%2CJ&amp;author=Camacho%2CRM&amp;author=Vahala%2CKJ&amp;author=Painter%2CO\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"57.\">\n<p class=\"c-article-references__text\" id=\"ref-CR57\">Chan, J. et al. Laser cooling of a nanomechanical oscillator into its quantum ground state. Nature <b>478<\/b>, 89\u201392 (2011).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/nature10461\" data-track-item_id=\"10.1038\/nature10461\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fnature10461\" aria-label=\"Article reference 57\" data-doi=\"10.1038\/nature10461\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2011Natur.478...89C\" aria-label=\"ADS reference 57\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=21979049\" aria-label=\"PubMed reference 57\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BC3MXht1ylt7bP\" aria-label=\"CAS reference 57\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 57\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Laser%20cooling%20of%20a%20nanomechanical%20oscillator%20into%20its%20quantum%20ground%20state&amp;journal=Nature&amp;doi=10.1038%2Fnature10461&amp;volume=478&amp;pages=89-92&amp;publication_year=2011&amp;author=Chan%2CJ\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"58.\">\n<p class=\"c-article-references__text\" id=\"ref-CR58\">Bochmann, J., Vainsencher, A., Awschalom, D. D. &amp; Cleland, A. N. Nanomechanical coupling between microwave and optical photons. Nat. Phys. <b>9<\/b>, 712\u2013716 (2013).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/nphys2748\" data-track-item_id=\"10.1038\/nphys2748\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fnphys2748\" aria-label=\"Article reference 58\" data-doi=\"10.1038\/nphys2748\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BC3sXhsVeqtrjL\" aria-label=\"CAS reference 58\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 58\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Nanomechanical%20coupling%20between%20microwave%20and%20optical%20photons&amp;journal=Nat.%20Phys.&amp;doi=10.1038%2Fnphys2748&amp;volume=9&amp;pages=712-716&amp;publication_year=2013&amp;author=Bochmann%2CJ&amp;author=Vainsencher%2CA&amp;author=Awschalom%2CDD&amp;author=Cleland%2CAN\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"59.\">\n<p class=\"c-article-references__text\" id=\"ref-CR59\">Balram, K. C., Davan\u00e7o, M. I., Song, J. D. &amp; Srinivasan, K. Coherent coupling between radiofrequency, optical and acoustic waves in piezo-optomechanical circuits. Nat. Photonics <b>10<\/b>, 346\u2013352 (2016).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/nphoton.2016.46\" data-track-item_id=\"10.1038\/nphoton.2016.46\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fnphoton.2016.46\" aria-label=\"Article reference 59\" data-doi=\"10.1038\/nphoton.2016.46\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2016NaPho..10..346B\" aria-label=\"ADS reference 59\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=27446234\" aria-label=\"PubMed reference 59\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed central reference\" data-track-action=\"pubmed central reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/pmc\/articles\/PMC4941791\" aria-label=\"PubMed Central reference 59\" target=\"_blank\">PubMed Central<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BC28XksFKqtLo%3D\" aria-label=\"CAS reference 59\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 59\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Coherent%20coupling%20between%20radiofrequency%2C%20optical%20and%20acoustic%20waves%20in%20piezo-optomechanical%20circuits&amp;journal=Nat.%20Photonics&amp;doi=10.1038%2Fnphoton.2016.46&amp;volume=10&amp;pages=346-352&amp;publication_year=2016&amp;author=Balram%2CKC&amp;author=Davan%C3%A7o%2CMI&amp;author=Song%2CJD&amp;author=Srinivasan%2CK\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"60.\">\n<p class=\"c-article-references__text\" id=\"ref-CR60\">Hong, S. et al. Hanbury brown and Twiss interferometry of single phonons from an optomechanical resonator. Science <b>358<\/b>, 203\u2013206 (2017).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1126\/science.aan7939\" data-track-item_id=\"10.1126\/science.aan7939\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1126%2Fscience.aan7939\" aria-label=\"Article reference 60\" data-doi=\"10.1126\/science.aan7939\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2017Sci...358..203H\" aria-label=\"ADS reference 60\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"mathscinet reference\" data-track-action=\"mathscinet reference\" href=\"http:\/\/www.ams.org\/mathscinet-getitem?mr=3726927\" aria-label=\"MathSciNet reference 60\" target=\"_blank\">MathSciNet<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=28935767\" aria-label=\"PubMed reference 60\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BC2sXhs1aksLnO\" aria-label=\"CAS reference 60\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 60\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Hanbury%20brown%20and%20Twiss%20interferometry%20of%20single%20phonons%20from%20an%20optomechanical%20resonator&amp;journal=Science&amp;doi=10.1126%2Fscience.aan7939&amp;volume=358&amp;pages=203-206&amp;publication_year=2017&amp;author=Hong%2CS\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"61.\">\n<p class=\"c-article-references__text\" id=\"ref-CR61\">Jiang, W. et al. Efficient bidirectional piezo-optomechanical transduction between microwave and optical frequency. Nat. Commun. <b>11<\/b>, 1166 (2020).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/s41467-020-14863-3\" data-track-item_id=\"10.1038\/s41467-020-14863-3\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fs41467-020-14863-3\" aria-label=\"Article reference 61\" data-doi=\"10.1038\/s41467-020-14863-3\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2020NatCo..11.1166J\" aria-label=\"ADS reference 61\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=32127538\" aria-label=\"PubMed reference 61\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed central reference\" data-track-action=\"pubmed central reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/pmc\/articles\/PMC7054291\" aria-label=\"PubMed Central reference 61\" target=\"_blank\">PubMed Central<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BB3cXkvFaisb4%3D\" aria-label=\"CAS reference 61\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 61\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Efficient%20bidirectional%20piezo-optomechanical%20transduction%20between%20microwave%20and%20optical%20frequency&amp;journal=Nat.%20Commun.&amp;doi=10.1038%2Fs41467-020-14863-3&amp;volume=11&amp;publication_year=2020&amp;author=Jiang%2CW\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"62.\">\n<p class=\"c-article-references__text\" id=\"ref-CR62\">Mirhosseini, M., Sipahigil, A., Kalaee, M. &amp; Painter, O. Superconducting qubit to optical photon transduction. Nature <b>588<\/b>, 599\u2013603 (2020).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1038\/s41586-020-3038-6\" data-track-item_id=\"10.1038\/s41586-020-3038-6\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1038%2Fs41586-020-3038-6\" aria-label=\"Article reference 62\" data-doi=\"10.1038\/s41586-020-3038-6\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2020Natur.588..599M\" aria-label=\"ADS reference 62\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"pubmed reference\" data-track-action=\"pubmed reference\" href=\"http:\/\/www.ncbi.nlm.nih.gov\/entrez\/query.fcgi?cmd=Retrieve&amp;db=PubMed&amp;dopt=Abstract&amp;list_uids=33361793\" aria-label=\"PubMed reference 62\" target=\"_blank\">PubMed<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"cas reference\" data-track-action=\"cas reference\" href=\"https:\/\/www.nature.com\/articles\/cas-redirect\/1:CAS:528:DC%2BB3cXis1ygs7bK\" aria-label=\"CAS reference 62\" target=\"_blank\">CAS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 62\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=Superconducting%20qubit%20to%20optical%20photon%20transduction&amp;journal=Nature&amp;doi=10.1038%2Fs41586-020-3038-6&amp;volume=588&amp;pages=599-603&amp;publication_year=2020&amp;author=Mirhosseini%2CM&amp;author=Sipahigil%2CA&amp;author=Kalaee%2CM&amp;author=Painter%2CO\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"63.\">\n<p class=\"c-article-references__text\" id=\"ref-CR63\">Kadota, M. &amp; Ogami, T. 5.4\u2009GHz Lamb wave resonator on LiNbO3 thin crystal plate and its application. Jpn. J. Appl. Phys. <b>50<\/b>, 07HD11 (2011).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1143\/JJAP.50.07HD11\" data-track-item_id=\"10.1143\/JJAP.50.07HD11\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1143%2FJJAP.50.07HD11\" aria-label=\"Article reference 63\" data-doi=\"10.1143\/JJAP.50.07HD11\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 63\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=5.4%E2%80%89GHz%20Lamb%20wave%20resonator%20on%20LiNbO3%20thin%20crystal%20plate%20and%20its%20application&amp;journal=Jpn.%20J.%20Appl.%20Phys.&amp;doi=10.1143%2FJJAP.50.07HD11&amp;volume=50&amp;publication_year=2011&amp;author=Kadota%2CM&amp;author=Ogami%2CT\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"64.\">\n<p class=\"c-article-references__text\" id=\"ref-CR64\">Yang, Y., Lu, R., Manzaneque, T. &amp; Gong, S. Toward Ka band acoustics: Lithium niobate asymmetrical mode piezoelectric MEMS resonators. In Proc. IEEE International Frequency Control Symposium (IFCS), 1\u20135 (IEEE, 2018).<\/p>\n<\/li>\n<li class=\"c-article-references__item js-c-reading-companion-references-item\" data-counter=\"65.\">\n<p class=\"c-article-references__text\" id=\"ref-CR65\">Yang, Y., Lu, R., Gao, L. &amp; Gong, S. 10\u201360-GHz electromechanical resonators using thin-film lithium niobate. IEEE Trans. Microw. Theory Tech. <b>68<\/b>, 5211\u20135220 (2020).<\/p>\n<p class=\"c-article-references__links u-hide-print\"><a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"10.1109\/TMTT.2020.3027694\" data-track-item_id=\"10.1109\/TMTT.2020.3027694\" data-track-value=\"article reference\" data-track-action=\"article reference\" href=\"https:\/\/doi.org\/10.1109%2FTMTT.2020.3027694\" aria-label=\"Article reference 65\" data-doi=\"10.1109\/TMTT.2020.3027694\" target=\"_blank\">Article<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" rel=\"nofollow noopener\" data-track-label=\"link\" data-track-item_id=\"link\" data-track-value=\"ads reference\" data-track-action=\"ads reference\" href=\"http:\/\/adsabs.harvard.edu\/cgi-bin\/nph-data_query?link_type=ABSTRACT&amp;bibcode=2020ITMTT..68.5211Y\" aria-label=\"ADS reference 65\" target=\"_blank\">ADS<\/a>\u00a0<br \/>\n    <a data-track=\"click_references\" data-track-action=\"google scholar reference\" data-track-value=\"google scholar reference\" data-track-label=\"link\" data-track-item_id=\"link\" rel=\"nofollow noopener\" aria-label=\"Google Scholar reference 65\" href=\"http:\/\/scholar.google.com\/scholar_lookup?&amp;title=10%E2%80%9360-GHz%20electromechanical%20resonators%20using%20thin-film%20lithium%20niobate&amp;journal=IEEE%20Trans.%20Microw.%20Theory%20Tech.&amp;doi=10.1109%2FTMTT.2020.3027694&amp;volume=68&amp;pages=5211-5220&amp;publication_year=2020&amp;author=Yang%2CY&amp;author=Lu%2CR&amp;author=Gao%2CL&amp;author=Gong%2CS\" target=\"_blank\"><br \/>\n                    Google Scholar<\/a>\u00a0\n                <\/p>\n<\/li>\n","protected":false},"excerpt":{"rendered":"Pawar, A. Y., Sonawane, D. D., Erande, K. B. &amp; Derle, D. V. Terahertz technology and its applications.&hellip;\n","protected":false},"author":2,"featured_media":470553,"comment_status":"","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[3845],"tags":[3965,42218,3966,24115,74,70,16,15],"class_list":{"0":"post-470552","1":"post","2":"type-post","3":"status-publish","4":"format-standard","5":"has-post-thumbnail","7":"category-physics","8":"tag-humanities-and-social-sciences","9":"tag-mechanical-engineering","10":"tag-multidisciplinary","11":"tag-nems","12":"tag-physics","13":"tag-science","14":"tag-uk","15":"tag-united-kingdom"},"share_on_mastodon":{"url":"https:\/\/pubeurope.com\/@uk\/115309117630637755","error":""},"_links":{"self":[{"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/posts\/470552","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/comments?post=470552"}],"version-history":[{"count":0,"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/posts\/470552\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/media\/470553"}],"wp:attachment":[{"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/media?parent=470552"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/categories?post=470552"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.europesays.com\/uk\/wp-json\/wp\/v2\/tags?post=470552"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}